Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

D1 D2 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-01J 8.5 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 1/8J TMH-04J TMH-03J 9.4 4 5/32J TMH-06J 11.7 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 6J TMH-07J 12.1 1/4J TMH-06 13.1 4.3 7.1 7.2 11.1 10 20 11 10.6 26.5 6 TMH-07 13.5 1/4 TMH-08 TMH-09 15.5 8 5/16 TMH-10 18.8 4.3 9.5 9.6 13.5 14 28 14.2 14.6 34 10 TMH-12 21.2 12 TMH-13 22 1/

C95Series

oO OUT 12,17 304 609 913 1217 1522 1765 30 IN 11 .08 277 554 831 1108 1385 1606 Note) Theoretical outpul(lbl) :: Pressure (pSI) X Piston area (IrI(:h2) Bore SlZ9 .

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no. NDd9 NDH10 NX R1 U1 Y-J010C 3.30.030 0.060 3.3+0.048 0 3.2 8 10 NTJ-015C 16 8 9.2 M5 x 0.8 4 Y-J016C 50.030 0.060 5+0.048 0 6.5 12 10 * A knuckle pin and retaining rings are included.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

XLAQ/XLDQ

High-temperature type (Temperature specifications/ H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

Aluminum High Vacuum Angle Valve

High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

High Vacuum Angle Valve

High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic

Table of Contents

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -