Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

XLAQ/XLDQ

High-temperature type (Temperature specifications/ H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

Aluminum High Vacuum Angle Valve

High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

High Vacuum Angle Valve

High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic

Table of Contents

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).  Energy saving is substantially increased by exchanging cooling water and heat directly.  The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

Cooling Capacity: 8kW, Option: C+N+Y

Circulating Fluid: Clear/Deionized Water, 10 to 60°C, Option: C+N+Y

Circulating Fluid: Ethylene Glycol Aqueous Solution, -20 to 90°C, Option: C+N+Y

Cooling Capacity: 1kW, Temperature Set Range: 20°C to 90°C, Option: C+N+Y

Cooling Capacity: 2kW, Temperature Set Range: 20°C to 90°C, Option: C+N+Y

Cooling Capacity: 1kW, Temperature Set Range: -20°C to 40°C, Option: C+N+Y

Cooling Capacity: 2kW, Temperature Set Range: -20°C to 40°C, Option: C+N+Y

Cooling Capacity: 8kW, Temperature Set Range: -20°C to 90°C, Option: C+N+Y