XLAQ/XLDQ

26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

end (E) 32 40 Head side pivot (C) 12 12 20 40 Double rod (W) Block mount (R) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch.

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

ZR

to 0.45 W.

7

10 45 14 11.5 3 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 4 x M6 Thread depth 12 F R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 78 + Stroke 190 + Stroke Clevis width CKG1A: 16.5 CKG1B: 19.5 CKG1C: 12.5 Unit: mm +0.3 0 +0.4 0 +0.5 0 Symbol F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40 51 5.5 56 49 58 60 55 57 58.5 5.5 56 49 72 74 69 CKP140, 50, 63 Rod

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

Compact Cylinder with Air Cushion and Lock Series RLQ

(mm) Joint A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 RS Allowable eccentricity (mm) M W T2 V 32 40 50 63 Bore size 1 Eccentricity tolerance 0.5 Backlash J E Joints are not included with A type and B type mounting brackets.

Heavy Duty Stopper Cylinder

MIW MIS 40 30 20 3.

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Non-contact Gripper

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

3

A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

KJ

No. q w e r t y u i o !

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !