Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25(L/R)/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25(L/R)EB Lead 6: LEKFS25(L/R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEKFS25(L/R)EA 10 15 Lead 12: LEKFS25(L/R)EA 10 Lead 20: LEKFS25(L/R)EH 5 Lead 20: LEKFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32(L/R)/Ball Screw Drive Horizontal Vertical

ZR

Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

,,: ,.

Bmm Pim Htlins Hex Head: PLUG \T Souare Head: PLUG Hex Countersunk: PLUG 1,," 21 Bmm S.l.E.45'tlme Tube To Male Pioe: CONNECTOR 1la 1B 5t16-24 7t16 .91 .078 3/16 'v8 sl8-24 7t't6 .98 .125 3/16 114 3ta-24 9/16 1 . 1 7 .125 1t4 1te 7t16-20 7116 1.O4 .189 1t4 114 7t16-20 9/16 1.25 .189 1t4 3/8 7t16-2016 .189 1t4 1t2 7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20

Dedicated Controller

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

COQ2BP

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

CXT

5 e r t q w @9 @4 MX @2 MTS CXTM Guide rod/bearing @8 MY CY @5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX CXTL Guide rod/bearing D@1 -X 20@6 Data !9 @7 !2 y !3 u o !8 !0 !7 !6 Component Parts Description Material Note No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Vacuum Filter AFJ Series

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size a Mounting Nil Without mounting option Option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

RSH

6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

T Example) MY2H40G-999L-A93-XB11 15 Order Made Specifications 5 Holder Mounting Bracket -X416/X417 Holder mounting brackets are used to fasten the stroke adjusting unit at an intermediate stroke position.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Table of Contents

Stroke ST (mm) 0 4 6 8 10 15 20 Caution Stroke ST (mm) When driving an inertial load, operate a cylinder with kinetic energy within the allowable value.

NAAMS Standards Compliant

T F Base type CKZ3N X2568 63 120 R T L C F With manually operated handle Bore size Top cover 50 50 equivalent 63 63 equivalent Nil Rubber cover (Equivalent to UL94 Standard V0: Flame resistant) M Metal cover Cylinder port Nil NPT TF G TP Rc With front mounting hole With metal switch cassette cover Arm opening angle Manually operated handle mounting position Symbol Arm opening angle X2742A

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Soft Start-up Valve AV2000/3000/4000/5000 1

AL High speed supply 1/2 PP PA PP PA 1 (P) 2 2 (A) 1 Since piston B t holds the fully open condition, during normal operation the cylinders speed will be controlled by the usual meter-out control. Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

2 62 3-8H10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 Stroke + 216 11.5 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

One-touch Fittings Series KQ2

O e b u t ) h c n i ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M R(PT) 6 1 / 3 8 / 1 S 1 0 5 0 T 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 5 . 2 2 4 2 5 . 6 1 6 2 1 4 / 1 S 2 0 5 0 T 2 Q K 4 1 5 . 6 2 6 2 1 2 8 / 1 S 1 0 7 0 T 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 3 2 6 2 7 1 6 . 4 2 1 4 / 1 4 / 1 S 2 0 7 0 T 2 Q K 4 1 5 . 7 2 8 2 2 2