5 Port Air Operated Valve Series VFA3000 1

2 1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole

CQ2

-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 14.6 16.6 21 25.6 41.6 50.6 64 72 10.2 12.2 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 For axis C shaped 5 For axis C shaped 8 For axis C shaped 10 For axis C shaped 10 For axis C shaped

DOC1020530

Power off Power on (0) (A): Ready-off, Servo-off Not ready to switch on (1) (15) Switch on Fault disabled (2) (7) (12) (10) (14) Ready to switch on (3) (6) (B): Ready-on, Servo-off (8) (9) Switched on (4) (5) Fault reaction active (16) (C): Ready-on, Servo-on Quick stop Operation (13) active enabled Error occurs (11) Transition by slave Transition by master Transition by slave or master FSA

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

Electric Actuator/Slider Type

5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

3 Port Solenoid Valve Rubber Seal Series SY100 1

For details, refer to catalog on page 4-3-15.] [Low wattage [0.45 W] is available, too. For details, refer to catalog on page 4-3-15.]

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work

VHS

pressure relief 3 port valve Port size 02 1 4 Body size Piping 03 VSH40l 3 8 0 1 Left(P) Right(P) Rc(PT) 4 5 3 4 1 2 Port thread 04 1 2 06 VSH50l 3 4 N NPT 1 4 3 8 Applicable port size: , F G(PF) JIS Symbol Circuit Example 3.6-15 Hand Valve Series VH Construction Precautions Be sure to read before handling.

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

NCA1

Standard) F (Cushion Location Standard) Head Cover Port Location A, B, C or D Head Cover Cushion Location A, B, C or D Cap Cover Port Location E, F , G or H D Cap Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair Kit Item Quantity Description 11 1 Head 12 1 Cap 13 1 Barrel 14* 2 Barrel Seal 15 4 Tie Rods 16 4 Tie Rod Nuts 21

Air Cylinder NCA1 Series

Standard) F (Cushion Location Standard) Head Cover Port Location A, B, C or D Head Cover Cushion Location A, B, C or D Cap Cover Port Location E, F , G or H D Cap Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair Kit Item Quantity Description 11 1 Head 12 1 Cap 13 1 Barrel 14* 2 Barrel Seal 15 4 Tie Rods 16 4 Tie Rod Nuts 21

Electric Actuator with Integrated Guide

D C B A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Tie-rod Type Hydraulic Cylinder

H B Material: Carbon steel Knuckle pin Tolerance C (f8) Order no.

Refrigerated Air Dryers

Correction factor 3 0.55 5 0.7 10 1 15 1.3 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Refrigerant R134a (HFC) IDU E IDU55E, 75E IDF100F to 150F Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.4 dew point [C] Correction factor 3 0.53 5 0.67 10 1 15 1.30 Refrigerant R407C (HFC) IDU E Data E: Air Flow Capacity IDF Series Model IDF1E

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

ISO Interface

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

Series VQ Metal Seal/Rubber Seal Body Ported

Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-