Detection Distance: 0.03 to 0.5mm, Piping Specifications: Rc 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: NPN Output, Electrical Entry: -

Detection Distance: 0.03 to 0.5mm, Piping Specifications: Rc 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: NPN Output, Electrical Entry: Angle Connector

Detection Distance: 0.03 to 0.5mm, Piping Specifications: G 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: NPN Output, Electrical Entry: -

Detection Distance: 0.03 to 0.5mm, Piping Specifications: G 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: -

Detection Distance: 0.03 to 0.5mm, Piping Specifications: G 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: Terminal Block Box

Detection Distance: 0.1 to 0.25mm, Piping Specifications: G 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: Terminal Block Box

Detection Distance: 0.1 to 0.25mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: NPN Output, Electrical Entry: Terminal Block Box

Detection Distance: 0.1 to 0.25mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: w/o Lead Wire

Detection Distance: 0.1 to 0.25mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: Terminal Block Box

Detection Distance: 0.03 to 0.5mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: -

Detection Distance: 0.03 to 0.5mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: PNP Output, Electrical Entry: w/o Lead Wire

Detection Distance: 0.03 to 0.5mm, Piping Specifications: NPT 1/8, Pressure Gauge: P4 [MPa+PSI Notation, Round Gauge, 0.4MPa (Not Avail. Japan)], Output Specification: NPN Output, Electrical Entry: Terminal Block Box

DIQ-69200-OM002

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method P6 Setting method P8 Key locking function P9 Setting of min. pressure, max. pressure and switch output P10 Mode of switch output P11 Setting of preset pressure P12 Reset function P12 Error indicating function P13 Detail setting mode P13 Gain setting P14 Zero clear P14 Initialize P15 LED display P15 1 - High

Parallel Seal Type Slit Valve

Specifications P4 2. How to Order P5 3. Construction/Operation P68 4. Precautions P89 5. Spare Parts List P10 6. Maintenance P10 7. Troubleshooting P11 Attachment: Maintenance Procedure P1216 1 - Slit Valve Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

High Vacuum L Type Valve

Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4

High Vacuum L Type Valve

Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4

ITV2-OM00112_E

Contents Contents P1 Safety Instructions P2 Handling precautions P4 Wiring method P5 Setting method P5 Error indicating function P6 Zero clear P6 LED display P7 1 - E/P Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

MICRO MIST SEPARATOR

SPECIFICATIONS OF BOWL ASSEMBLY (P11 to P18). 24 Revision history A The tightening torque value of the element assy is changed. 2017.4 B P4 Addition:grease type,P9 Change: grease type. P5 Correction:Air SourceCATION P8 Correction: bracket assy drawing and description. P18 Correction:dimension of metal bowl with level gauge. P24 Deletion:bracket assy disassembly drawing. 12.

Clean Air Module

Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3 P4

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.