Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#B: 01 (Hex) EX600-DX#C: 03 (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter Channel
Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.
3 (R2) 2.0 VQC2401 3.2 0.28 0.49 0.30 0.80 Rubber seal 34 or less 44 or less 3 position closed center 2.4 VQC2500 2.0 0.17 0.57 0.18 0.46 Metal seal 29 or less 38 or less Pressure center (A) 4 (B) 2 3.2 VQC2501 2.2 0.28 0.80 0.31 0.60 Rubber seal 34 or less 44 or less Dual 3 port valve Rubber seal VQC2 01 34 or less 44 or less A B C 1.8 1.8 0.28 0.46 0.28 0.46 1 (P) 5 (R1) 3 (R2) 6.2 VQC4100
121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.
fitting 5/16" One-touch fitting SV1000 SV1000 10 One-touch fitting 3/8" One-touch fitting SV2000 SV2000 12 One-touch fitting 3/8" One-touch fitting SV3000 SV3000 12 One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 Ports 2, 4 mixed SV4000 SV4000 NPT 3/8 Rc 3/8 G 3/8 NPTF 3/8 In case of mixed specification (M), indicate separately on a manifold
IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.
Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).
1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1
) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.
8' one-tolch iiltino 5/16'one{ouch fitlinq 3/8" one-touch litling NPT 1/4 N PT 3/8 NPT:I/8 NPTF 1/4 NPTF 3/8 NPTF 38 A, B ports mixed 'ln case ofmixed speclrcalion (l',{1. ndicale separalely on a manlold specticalon sheet 3/8' one-louch litl ng sv4000 Rc 3/8 G 1/4 G 3/8 G 3/S A.
Display unit settings Flow setting Hysteresis setting Peak/Bottom value -28No.PF-OMA1011-A 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps. Use this mode if the product is to be used straight away, after changing only the set values. (The current flow value is displayed on the main display.)
Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil
8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000, #3 SAC2503, #3 SAC4000, #3 SAC4006, #3 SAC5000, #3 SAC6000, #3 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 1.17-6 AL1000 to 6000 Dimensions Metal bowl Option specifications/1000cm 3 tank Metal bowl with level gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177
Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.
Setting value buffer memory address for setting Item Setting value Default value AXIS AXIS AXIS AXIS 1 2 3 4 00: Positioning complete Da.1 Operation pattern 01: Continuous positioning control 11: Continuous path control a Da.2 Control system b (Note 1) b c Setting value 0:Pr.9 Acceleration time 0 1:Pr.25 Acceleration time 1 2:Pr.26 Acceleration time 2 3:Pr.27 Acceleration time 3 Da.3 Acceleration
(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking
LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.
Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.
1/4" ons-lqgslr 1;a'aa 3/8 one-toucn fiftrng l0mrn one louch trh nq 12mm one-louch fin nq sv4000 Rc 38 Rc 3/8 G 1/4 G 3'l8 G 3/8 'ln case or mixed speciricatio.