3 Position Cylinder Series RZQ

Table 3 Bore size (mm) 32 40 50 63 Allowable kinetic energy (J) 0.29 Graph (1) 200 0.52 63 0.91 100 50 1.54 The kinetic energy of a load can be found with the following formula.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

JXCx-OMU0026

12.0 0.5 Axis 3 Absolute 50 100.00 1000 1000 0 0 30 100 6.0 12.0 0.5 Axis 1 Relative 500 800.00 1000 1000 50 50 35 100 0 0 10.0 1 Axis 2 Relative 500 900.00 1000 1000 50 50 35 100 0 0 10.0 Axis 3 Relative 500 900.00 1000 1000 50 50 35 100 0 0 10.0 Step Data details Description Input range Explanation Step No. 0 to 2047 Number of step data. 3 lines (4 lines partially) of data per step.

5 Port Solenoid Valve

Manual override 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 31.5 37 41 50 162 G1/2 R1 R2 P 18.4 Electrical entry 1/8" PE. port 41 41 27.5 27.5 1/8" External pilot port PE X R2 R1 18.4 P 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 18 41 41 27.5 27.5 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 650 A

VDW

1/8 1 (IN) port 8.5 (6.3) VXA 6 12.8 VCHm 1/8, 1/4 1 (IN) port 1/8, 1/4 2 (N.C.) port 2 x M3 x 5 Dimensions inside ( ) are for port size 1/8.

58

159 221 75 40 133 182 244 32 1/2 1 50 170 164 234 98 0.050 0.089 1/5 stroke 110 159 221 75 40 133 182 244 36 1/2 1.5 55 190 184 262 98 0.050 0.089 1/5 stroke 120 173 241 75 40 141 194 262 40 3/4 1.5 60 212 204 292 106 The minimum stroke with rod boot is 30 mm or more for 125, 140 and 35 mm or more for 160.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

LVQ

-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 (H) 28.5 57 34.5 69 103 16.5 137 N 28.5 57 34.5 69 108 22 151 M 42 84 48 96 165 25 202 42 84 48 96 175 32 236 J 21.8 K 37 L 5 M 7 N 15 Q 21 Y 55 Model LVQH20S-Zm-1 LVQH30S-Zm-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 C B A D 32 50 6 7 20 25 80 1/46 1/46 37.5 55.5 6 7 20 25 80 50.2 78.2 10 7 20 38.5 110 60 88 10 7 20 38.5 110 Multi-turn type (with indicator

LEC-OM02904

) 31 32 33 34 1 (2) 35 36 2 37 3D 45 (1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

CE

, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5 49 60

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Standard (0.95 W) High-speed response type 4 B 3 2 1 4 3 2 4 1 3 1 2 Light/surge voltage suppressor (0.95 W) High-pressure type (1.0 MPa) K Note 2) Yes None Nil E Negative common N Note 3) Coil voltage 1 2 3 4 5 6 CE compliant External pilot R Note 3) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Standard (0.95 W) High-speed response type 4 B 3 2 1 4 3 2 4 1 3 1 2 Light/surge voltage suppressor (0.95 W) High-pressure type (1.0 MPa) K Note 2) Yes None Nil E Negative common N Note 3) Coil voltage 1 2 3 4 5 6 CE compliant External pilot R Note 3) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption

Compact Cylinder

depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5 74 6.5 16 8 46 5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49

Air Slide Table Series MXW

W = 1 [kg] (Except arm section mass) L3 = 50 [mm] L2 = 50 [mm] 1 = W/Wmax MXF Item Load factor n Note Va MXW W Examine W.

100

L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.