Type of Actuation: 2 Position Single, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 200VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Body Ported 1/4, Base Mounted Sub-plate 1/4, Thread: NPTF, Option: Side Bracket

Type of Actuation: 2 Position Single, Manifold Type: Body Ported, Pilot: Internal Pilot, Specifications: Standard, Voltage: 200VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: 3/8" One touch Fitting, Thread: Rc (or None), Option: Foot Bracket

Port Size: 1/2 Rc, Voltage: 200VAC, 50/60Hz, Electrical Entry: DIN Terminal, Light & Surge Suppressor: None, Bracket: Bracket

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC200V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/4, Pressure Rating(MPa): 0 to 0.9, Driving Type: Linear Motion Poppet, Pilot Air

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 94, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Voltage: 200 VAC, 50/60Hz, Electrical Entry: DIN Terminal, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Type, Flush, Thread: NPT, Solenoid: Single Solenoid, CE Marking: CE Marked Product

Port Size: 04 (1/2 Rc), Voltage: 2 (200VAC, 50/60Hz), Electrical Entry: D (DIN Terminal), Light & Surge Suppressor: None, Bracket: B (Bracket)

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 94, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～50, End Locking: No, Valves: Presence, Operating Pressure(MPa): 0.15～0.9, Cushion: With cushions on both sides, Specification

Adsorption Plate

Adsorption surface size SP2330 SP2430 SP2530 SP2630 150 x 150 180 180 20 150 82.5 82.5 105 16 200 x 200 230 230 20 200 107.5 107.5 130 25 250 x 250 280 280 25 250 132.5 132.5 155 36 300 x 300 330 330 25 300 157.5 157.5 180 49 755 SP Series Made to Order Please contact SMC for detailed specifications, delivery and pricing.

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000 40 2000 Made to Order Specifications (For details, refer to page 6-17-1.)

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

CY1

, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Table of Contents

2 Stainless steel Return spring Black y Resin End plate Replacement Parts VFR210 VFR220 VFR230/240/250 Part no. No. Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10.

SQ1000/2000

Station 11 Station 23 630 390 Station 12 Station 24 410 Station 13 Flat ribbon cable kit (P kit), PC Wiring System compatible (J kit) For single wiring SSQ1000 P 40A 250 L Symbol (Dimension L) Station Station Symbol (Dimension L) 190 430 Station 2 Station 14 210 450 Station 3 Station 15 230 470 Station 4 Station 16 250 490 Station 5 Station 17 270 510 Station 6 Station 18 For double wiring

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note