JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Cylinder with Lock Series CNS

Ht 56 56 34 A B 30 (33) 36 Approx. Hs Approx. Hs Auto switch Numbers in ( ) are for type D-F5LF. D-A4 D-A5/A6 G(PF)1/2 Auto switch 34.5 (compatible cable O.D. 6.8-11.5) Approx. Ht Approx. Ht A B B Approx. Hs 33 36 Auto switch A Approx.

CE2

1 Stroke Reading Cylinder with Brake Series CE2 40, 50, 63, 80, 100 RE A B REC CX Brake mechanism added to a stroke reading cylinder which can measure stroke length.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Mitsubishi Electric Corporation Yaskawa Electric Corporation 100/115VAC (50/60Hz) 1 G N.C. (B contact) 2 pcs.

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

Compact Vacuum Unit

ZB1 PS 1 A o V-port assembly Pressure sensor specifications ZB1 VPN3 A C2 0 to 14.6 psi (0 to 101 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less 1 3 14.5 to 14.5 psi (100 to 100 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less One-touch fitting C2 C4 N1 N3 L2 L4 LN1 LN3 Straight 2 mm one-touch fitting Straight 4 mm one-touch fitting Straight 1/8" one-touch fitting Straight 5/32" one-touch

Series VQ Base Mounted Metal Seal/Rubber Seal

Sl unit output No. 0 1 2 3 4 5 6 7 8 9 A B A B A Void A Void A B A B A B B A A A SY Double Double Double Double Double Sl unit Sl unit Single Single Single Single Single SYJ Stations Stations 1 2 3 4 5 1 2 3 4 5 Double wiring (Standard) Single/Double mixed wiring (Option) SX VK SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link System (Sharp) VZ ADDRESS NO.

0.

p K Note 1) Note) For inch size one-touch fittings and optional thread type, refer to page 15. p p R Note 1, 2) External pilot type High speed response/External pilot type BR Note 1, 2) (0.9 W) Manual override p Nil B Non-locking push type (Tool required) Locking type (Tool required) High pressure/External pilot type (Metal seal type only) KR Note 1, 2) (0.9 W) p Note 1) Option Note 2

Fieldbus system EtherCAT compatible SI Unit

1> Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 AXA DY#B DY#B DX#B DX#D SEC3 Digita Digital SI unit Analogue Digital output Digital output input input input End Valve plate 4 bytes 1 byte 2 bytes Input Input Input 1 byte 1 byte 4 bytes Output Output Output Input data: (Unit 0) Analogue input unit (EX600-AXA): 4 bytes occupied Input data: (Unit 3) Digital input unit (EX600-DX#B): 1 byte

Vacuum Module Series ZX

1 (ZX1-S1) (For side mounting) 1 11.5 7 AEP 1 20 HEP 41 51 8 Bracket B (Standard accessory) ZX1-OBB Related Equipment (Mounting hole) 2 x 3.6 2 x R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit A A 35.4 2 x 3 1 Vacuum port (V) M5 (or M6) 5.4 (Mounting hole) 2 x 3.5 (Mounting hole) Bracket A (Standard accessory) ZX1-OBA 887 Series ZX Air supply for supply valve pilot

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

Electric Actuator / Guide rod Slider

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In pos[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -19- Example of step data input (2) < Positioning operation Ralative > a b c d e f g h i j k No.

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

Bag Filter

FGF 1 20 E A X47 B Option Note 1) Note 1) Without pressure gauge/Without option: is not required to enter.

Intrinsically Safe Valve

Electrical entry 2(B) 4(A) Symbol Electrical entry L-type plug connector B Note 2) 5(EA) 3(EB) 1(P) L 4-position dual 3 port valves (N.C./N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

CNG

2 2 MNB 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100 40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

32UNC #8-32UNC #10-32UNF 1/4-28UNF 8 8 8 9.5 6.8 6.8 6.9 8.1 11.5 11.5 12.5 14.5 Basic A B A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

240

or less 100 70 30 3 100 15 1 LEC 11.

Compact Type

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.