VDW

resistant construction. 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Nil Thread type 6 VDC Rc 5 VDC F N G 3 VDC NPT Please consult with SMC regarding other voltages.

HRX-OM-I051

4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-3 5.3.1 Model Indication screen . 5-3 5.3.2 Status screen 1 . 5-3 5.3.3 Status screen 2 . 5-4 5.3.4 Status screen 3 . 5-4 5.3.5 Status screen 4 . 5-5 5.3.6 Menu screen

Brake mechanism added

) 20 75 90 100 110 (Different surfaces) 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 90 + 50 (n = 4, 8, 12, 16, ) Note 2) (n 4) 2 D-B59W 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) (

SFOD-OMT0010

5 5 5 5 5 interpolation) Min. speed [mm/s] 8 8 8 9 9 9 (Speed tuning control) 112 No.SFOD-OMT0010-B Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead

100

5 !1 !4 Component Parts No.

LEYx-OMZ0015

16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush (Piston rod part) Sliding bush (Piston rod part) Operating temperature range [] 5 to 40 5 to 40 5 to 40 Operating

Water-cooledThermo-chiller

) 5 25 4 20 HRW015-H 3 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 15 2 HRW008-H 10 1 5 HRW002-H 0 10 20 30 40 50 60 70 80 90 0 0 10 20 30 40 50 60 70 80 Temperature difference t (C) (Circulating fluid temperature Facility water temperature) Circulating fluid temperature (C) When pump inverter is operating at frequency of 60 Hz (maximum).

Lightweight and Compact

C 5 to 45 Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating fluid system Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50

pa

Recommended Valve PA3000 PA5000 VQZ140 (Exhaust center) VQZ240 (Exhaust center) Refer to page 17-5-160 for details. 17-5-153 Series PA Performance Curve: Air Operated Type PA313 Flow Characteristics PA513 Flow Characteristics 50 50 Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa) Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa or 0.3 MPa) SUP = 0.5 MPa 40 40

Clamp Cylinder with Lock Series CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.

SV

-www.stevenengineering.com 34 30 5 48 50 2 5 1 l 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

High Power Cylinder Series RHC

There may be the case it will vary substantially depending on an ambient environment. 4.5 5 6 6.5 6.5 7 4 35 40 40 45 45 45 45 50 D-G5NBL Mounting Bracket Part No.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Cylinder with Turntable Series MGT

1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Bottom ported drawing 27 4(A),

VEX1

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 1 2 3 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 4 9 2 2 7 240 VAC 50/60 Hz 9 Other Option Thread type Nil Rc G NPT NPTF F N T Model Select type Port size Basic