High Vacuum L Type Valve ) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34
oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW
100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW
Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW
Magnet: D (Built-in), Type: Pneumatic, Mounting: U (Rod Trunnion), Bore: 25mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: SAPC (0.5m Cord Length
Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 20mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 20mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: D (Built-in), Type: Pneumatic, Mounting: C (Single Clevis), Bore: 20mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: U (Rod Trunnion), Bore: 40mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Leadwire or Prewired Connector: L (3m)
Magnet: D (Built-in), Type: Pneumatic, Mounting: E (Integral Clevis), Bore: 40mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: L (3m), Number: S (1
Magnet: None, Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or
Magnet: None, Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None
Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP
Magnet: None, Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 25mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the
Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 40mm, Port Thread Type: TF (G), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal, Lead Wire or Prewire Connection: SAPC (0.5m Cord
Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire
Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical
Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP,
Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: A (Air Cushion), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire,
Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 50mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication