Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid
Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .
4 r e !0 !1 q i !2 o !3 y Component Parts No.
2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.
Blue e Power supply (Light terminal) N.C. N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.
d e e d : Cat. 3 can only be achieved with a redundant sensor (2 series NO contacts) and a connecting cable that meets the fault exclusion requirement of EN13849-2. : The category that can be achieved depends on the sensor used. 18 No.EX##-OMY0004 3.3.8.
Table 3.8-2 RTU mode message frame Address c)Function d)Data e)Checksum a)Start b)Device (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (noncommunication time).
Dimensions MGQL (Ball bushing bearing)/A, DB, E Dimensions (mm) (mm) E E A A Bore size Bore size DB DB (mm) 12 16 20 25 (mm) 12 16 20 25 Over 50 st Over 30 st Over 30 st 50 st or less 50 st or less Over 50 st 30 st or less 30 st or less 8 6 39 0 55 16 43 4 10 8 43 0 65 22 49 6 12 10 74 27 61.5 57 10 47 0 14.5 16 13 79.5 32 62 63.5 16 47.5 0 14.5 Note) For intermediate strokes other than standard
This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.
Description Material AMD150 AMD250 AMD350 AMD550 AMD650 AMD850 Glass fiber, Others Element assembly AMD-EL150 AMD-EL450 AMD-EL250 AMD-EL350 AMD-EL550 AMD-EL650 AMD-EL850 r Element assembly: With gasket and O-ring AMD800 to 1000 HA AT ID Component Parts AMG Model AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 AMD801/901 Note No.
Description Material AMF250 AMF350 AMF550 AMF650 AMF850 AMF150 Glass fiber, Others Element assembly AMF-EL250 AMF-EL350 AMF-EL450 AMF-EL550 AMF-EL650 AMF-EL850 AMF-EL150 r Element assembly: With gasket and O-ring AMF800 to 1000 HA AT ID Component Parts AMG Model AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMF801/901 Note No.
Power supply connector Cable Qty. x size 3cores14AWG 3cores2.0mm2 *including ground N E(Earth) L Fig 3-3 Cable connection 5. Insert the power supply connector to the power supply connector socket. 6.
E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description
(Use an auto switch rated 24V DC, with a minimum amperage capacity of 10mA.) q q q w w w e e e r (Unit: N) Bore size (mm) 40 50 63 80 100 Operation r Min. sensing weight 26 40 62 100 160 Warning Back-up of the balance pressure data The balance pressure data is backed up by the controller for approximately 5 minutes during a power outage or when the power supply has been turned OFF.
How to order L E C C G 1 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions 39 (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.