SMC Pneumatic Clean Series

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

SMC Pneumatic Clean Series

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

SMC

105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor

Compact Cylinder

L x 105 L 105 105 -50 -50 x 110 L x 110 L 110 110 -75 -75 x 135 L x 135 L 135 135 -100 -100 x 160 L x 160 L 160 160 Material: Chromium molybdenum steel Surface treatment: Nickel plated 3 Series CQU Allowable Kinetic Energy Operating pressure: 0.5 MPa 100.0 10.0 Load mass [kg] 40 32 25 20 1.0 0.1 10 100 1000 Maximum speed [mm/s] Allowable Rod End Lateral Load Eccentric distance Stroke 100.0

ZP

H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20-6-A14 84 139 88 143 50 ZPYB10--A10 62.5 63 68 102 23 96.5 97 ZPYB30-6-A14 94 149 98 153 ZPYB20--A10 137 142 74.5 75 80 136.5 51 ZPYB50-6-A14 114 194 118 198 75 ZPYB30--A10 5 1.8 14.5 7 2.5 16.5 147 152 84.5 85 90 146.5 ZPYB40--A10 183 188 94.5 95 100 182.5 77 ZPYB50--A10 104.5 192.5 105

ZP

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105

MY1

Refer to the order made section on page 105 for details. New New ew ew Uses two linear guides.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105

Sensor Monitor

Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564, PSE574 0 to 500 kPa

Vacuum Unit Ejector / Vacuum Pump System

Model ZK2-ZSE-A ZK2-ZSF-A (Switch unit: Standard model number) (ZSE10) (ZSE10F) Rated pressure range 0 to -101 kPa -100 to 100 kPa Set/Display pressure range 10 to -105 kPa -105 to 105 kPa Proof pressure 500 kPa Minimum setting unit 0.1 kPa 12 to 24 VDC 10%, Ripple (P-P) 10% or less Power supply voltage (Protected against reverse connection) Current consumption 40 mA or less Output type NPN

Vacuum Unit Ejector / Vacuum Pump System

Model ZK2-ZSE-A ZK2-ZSF-A (Switch unit: Standard model number) (ZSE10) (ZSE10F) Rated pressure range 0 to -101 kPa -100 to 100 kPa Set/Display pressure range 10 to -105 kPa -105 to 105 kPa Proof pressure 500 kPa Minimum setting unit 0.1 kPa 12 to 24 VDC 10%, Ripple (P-P) 10% or less Power supply voltage (Protected against reverse connection) Current consumption 40 mA or less Output type NPN

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Air Fittings & Tubing

Nylon Urethane L2 L1 M KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 2.6 6.8 16.2 25.6 35.4 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 M12 X 1 M14 X 1 M16 X 1 M20 X 1 M22 X 1 2.6 32 36 42 79 105 14 17 19 24 27 40.5 42.7 49.4 53.9 56.1 6.8 13.1 20.4 30.4 Straight union: KCH Effective area (mm2) Weight (g) Tube O.D.

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

VZ100/300/500

N.O. 105 (Without sub-plate: 75) Base mounted (With sub-plate) 1 8 Note) Weight stands for grommet type. Option Description Foot bracket Part no. DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Table of Contents

2n-Rc , 3 8 1 2 Pilot valve manual override Double check spacer U side Individual SUP spacer Air release valve Pressure switch Air release valve Pressure switch Stations Outlet for check Air filter regulator D side 105 Control unit Rc 3/4 (Po port) 209.5 n: Stations Pilot EXH port: PE 2-Rc 1 8 Stations 4 5 6 7 8 9 10 Formula L1 = 43 x n + 70 3 199 211 L L1 L2 L3 (MP) L3 (AP) 242 254 428.5

VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 x 45 with SW M6 x 18 with SW M6 x 55 with SW M6 x 85 with SW M6 x 100 with SW M6 x 105 with SW M6 x 125 with SW M6 x 140 with SW M6 x 145 with SW M6 x 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Proposals for Energy Saving

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing April, 2001 D-SMC.L.A. P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

Guide Cylinder/Compact Type Series MGC

Cutout window AM MGQ View A-A MGG Mounting dimensions MGC (mm) Bore size (mm) Stroke range (mm) MGF A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K M N L 20 25 32 40 50 80 84 75 90 6.6 9 60 75, 100, 125, 150, 200 12 13 105 120 55 110 M6 22 106 25 44 38 25 MGZ 95 89 16 13 120 136 84 100 9 9 65 125 M8 27 120 30 52 70 46 32 105 94 16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 x 4 x RT 80, 100 2 x 4 x RT BG With rod boot e d l h f h + L8 + VA + Stroke Bore size [mm] Stroke range [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VA VD WA WB WH ZZ Without rod boot With rod boot 32 Up to 2000 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 4 7 26 146 40 Up to 2000 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105