Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

Programless controller (with stroke study) Step motor (servo 24 VDC)

(g) (f) 6) Press the set button (g) for 2 seconds or longer to change the 7-segment LED(f) from on to flashing state. The set parameter value can be changed during this (g) state. 7) Push Forward button (i) or Reverse button (j) to (e) (j) change the set value of the parameter ("3" is in this example).

Metal Seal/Rubber Seal Series VQ Body Ported

Note) L M G Note) L M G VQ111 (H) (Y) VQ111 (H) (Y) X18 Nil {A side (Bottom side)} {B side (Top side)} X18 Nil {A side (Bottom side)} {B side (Top side)} 3 position (VQ1000) 3 position (VQ1000) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only 2-4-99 Series VQ Construction: VQ1000/Plug Lead Unit, Cassette Type Metal

5 Port Solenoid Valve

-position single 2-position double G Grommet 4-position dual 3-port (N.C. + N.C.)

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

LG1H

Refer to page 57 for mounting. 30 A B Stroke Model LG1H21NC500-F LG1H21NC600-F LG1H21NC700-F LG1H21NC800-F LG1H21NC900-F LG1H21NC-1000-F 360 460 560 660 760 860 500 600 700 800 900 380 480 580 680 780 880 95 B 95 100 8(4) x 6.2 (170) () () 1000 20 95 A 95 110 (150) () () Positioning Time Guide Positioning time Positioning time (sec.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

LEF*-OMZ0025 PRODUCT NAME Electric Actuator Slider Type High performance Battery-less absolute encoder MODEL / Series / Product Number LEF Series LEFS*G #This manual describes the dedicated terms for LEFS*G. Refer to the manual of LEF series about other details. #Refer to the manual relevant to the controller being used for full operating instructions.

Electric Actuator / Guide rod Slider

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF -17- Step No. 1: Positioning operation a b c d e f g h i j k [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

Heavy Duty Stopper Cylinder

0.2 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] Upper limit 80 Operating range 80 Operating range Upper limit Lower limit Lower limit 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] 592 Model Selection RS2H Series Lateral Load and Operating Pressure The

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Low Friction Cylinders Series MQ

Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 The MQM series is not auto switch capable. REA Mounting Style/Accessories REB L: Foot Note F: Rod side flange G: Head side flange C: Single clevis D: Double clevis Mounting bracket B: Basic REC (1 pc.) (2 pcs.) (1 pc.) (1 pc.)

Compact Cylinder

Weights Unit: g D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch part no.

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Width across flats G MM MM R (max.)