HRX-OM-W004

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Clean Regulator/Fluororesin Type

e t y t y r i r u i !

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

AMD

Description Material AMD150 AMD250 AMD350 AMD550 AMD650 AMD850 Glass fiber, Others Element assembly AMD-EL150 AMD-EL450 AMD-EL250 AMD-EL350 AMD-EL550 AMD-EL650 AMD-EL850 r Element assembly: With gasket and O-ring AMD800 to 1000 HA AT ID Component Parts AMG Model AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 AMD801/901 Note No.

AMF

Description Material AMF250 AMF350 AMF550 AMF650 AMF850 AMF150 Glass fiber, Others Element assembly AMF-EL250 AMF-EL350 AMF-EL450 AMF-EL550 AMF-EL650 AMF-EL850 AMF-EL150 r Element assembly: With gasket and O-ring AMF800 to 1000 HA AT ID Component Parts AMG Model AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMF801/901 Note No.

HRX-OM-W002

Power supply connector Cable Qty. x size 3cores14AWG 3cores2.0mm2 *including ground N E(Earth) L Fig 3-3 Cable connection 5. Insert the power supply connector to the power supply connector socket. 6.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

r t q w e r t i i o o !

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Component Parts No. q w e r t Description

VY511, VYU5

(Use an auto switch rated 24V DC, with a minimum amperage capacity of 10mA.) q q q w w w e e e r (Unit: N) Bore size (mm) 40 50 63 80 100 Operation r Min. sensing weight 26 40 62 100 160 Warning Back-up of the balance pressure data The balance pressure data is backed up by the controller for approximately 5 minutes during a power outage or when the power supply has been turned OFF.

OMS0020

How to order L E C C G 1 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions 39 (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.

Gun Type Ionizer

Hardness and deterioration of connected tubes e. Air leakage 192

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

For note e, refer to the left. e When using the type with a drain valve, drain guide, or a ball valve, discard the drainage before the drainage level reaches the center of the sight glass.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

C92

9 @0 @1 @2 Description Wearing Serrated washer Cushion seal Rod seal/Gasket Piston seal Cushion screw seal Cylinder tube gasket Piston gasket Magnet ring Material Note Description Aluminum alloy Aluminum alloy Aluminum alloy 1.4301stainless steel Aluminum alloy Rolled steel Rolled steel Lead bronze casting Steel Steel Steel Steel wire Steel No. q w e r t y u i o !0 !1 !2 !

VR4151/4152

8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port !4 !3 w !2 !

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

SMC's E-MY2 series e-rodless actuators require no programming, and have both the operational ability of an air cylinder, and the speed controllability of an electric actuator.  The series consists of the E-MY2B (basic), E-MY2C (cam follower guide), E-MY2H (linear guide, single axis), and the E-MY2HT (linear guide, double axis) styles.