Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.
VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2
IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15
(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer
16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 13.5 19.5 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3 542 C(L)KQG32/C(L)KU32
Rail mounting hole pitch 12.5 C No. 0 1 2 3 4 5 6 7 8 9 B L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 Weight (g) A 11 12 13 14 15 16 17 18 19 No. 10 L dimension 223 235.5 248 260.5 273 285.5 298 310.5 323 335.5 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 84.9 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model
L D d l m t d H B C 0.040 0.076 20 NT-02 IY-G02 20 21 7.6 16.2 1.5 0.9 M8 x 1.25 5 13 15.0 Type C 8 for axis 8 0.040 0.076 25 NT-03 IY-G03 25 25.6 9.6 20.2 1.55 1.15 M10 x 1.25 6 17 19.6 Type C 10 for axis 10 0.040 0.076 32, 40 NT-04 IY-G04 32, 40 41.6 9.6 36.2 1.55 1.15 M14 x 1.5 8 22 25.4 Type C 10 for axis 10 0.050 0.093 50, 63 NT-05 IY-G05 50, 63 50.6 13.4 44.2 2.05 1.15 M18 x 1.5 11
Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3
Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3
2 U seal Retaining ring for hole type C HNBR Tool steel y !
x 8.5 x 1 C-5 C-14 6.2 x 3 x 1.6 23 4 When o and !
Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.
(1) Controller setting . 25 (2) PLC set up . 25 (3) LED Display . 25 3.10 Operation test by PLC . 25 4.
1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.55mm 2 3 12 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) -17No.JXC-OMT0001CN-C Download Download -18No.JXC-OMT0001CN-C (3) View(V) Step Data Download Area input numerican data Movement mode Step No.Movement mode Movement mode 9.4 Download -19No.JXC-OMT0001CN-C 3.7 JOG (1) ON ON SVRE ON View(V) Status SVRE ON SVRE
A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.
A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.
R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.
-A34(C), IJ.-A44(C), IJ.-AS4, F-B54 Max. SOmA I Max, 25mA Max. 12.SmA .
Construction/Dimensions (mm) R Note 2) F Note 1) PA M MD MM LA L C HB B HA W Model A CY1B 6 12 M3 x 0.5 x 3l 15 17 6.3 11 35 18 10 2.5 CY1B10 17 M3 x 0.5 x 3l 15 38 18 25 9.5 26 10 2.5 CY1B15 4 25 M3 57 25 M4 x 0.7 6.5 23 16 35 5.5 16.5 6 36 CY1B20 27 4 30 M4 x 0.7 M3 66 18 36 6.5 5.5 17 23.5 6 37 CY1B25 36 M5 x 0.8 M4 5 30 46 8.0 21 28.5 70 47 20 5.5 7 CY1B32 M5 6 47 M6 x 1.0 9.5
Flow Characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-21P SYJ323 1/8 M3 x 0.5 0.9 SS5YJ3-32P-M5 SS5YJ3-32P-C4 Base mounted for internal pilot 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 M5 x 0.8