Wireless System

C 8 inputs M8 connector (3 pins) 8 pcs. D 16 inputs M12 connector (5 pins) 8 pcs. E 16 inputs D-sub connector (25 pins) F 16 inputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

type: Stainless steel 598 Series AS20-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type, Elbow Type (Metal Body) Dimensions L4 D3 AS TMH ASD AS AS-FE KE H AS-FG (Hexagon width across flats) AS-FP T2 AS-FM AS-D AS-T AS-D AS-T ASP A L2 ASN D1 AQ L3 ASV AK VCHC ASS D2 T1 L1 ASR ASQ Dimensions A Weight (g) AS120-U10/32-D 10-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 9 M5 x 0.8

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

Bag Filter

Gauge port in the outlet side (Pressure gauge) Rp1/4 Rc2 Inlet Gauge port in the outlet side (Pressure gauge) Inlet Drain port 25(2B)JIS10KFF D C B A O.D214 O.D458 Outlet 275 D 100(4B)JIS10KFF Rc2 C 580 B Outlet A 250 25(2B)JIS10KFF Fluid release 365 289 185 Fluid release Rc2 (mm) E FGFS3A-40 FGFC3A-40 FGFL3A-40 FGFR3A-40 FGFS3B-40 FGFC3B-40 FGFL3B-40 FGFR3B-40 Model A B C D (135) (mm) 866

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

OMR0031

L A T C A N X 1 5 2 Made to Order Note3) Card Motor controller Note2) NIL Standard product X152 I/O cable (without shield) Option Parallel I/O NIL Direct mounting N NPN D Note1) DIN rail mounting P PNP I/O cable length Note3) NIL Without cable 1 1 m 3 3 m 5 5 m Note 1) The DIN rail is not included, this must be ordered separately.

AMD

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.

CC

Converter nominal size Electrical entry of solenoid valve Through the availability of a wide range of series in terms of converter capacity and valve unit flow rate control capa63 100 160 63mm 100mm 160mm G C D Air operated Grommet Conduit DIN terminal bility, speeds as high as 200mm/s (throttle valve) can be achieved with a 80 cylinder.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

VDW Series

Enter together in order, counting from station 1 on the D side.

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

VXA21/22

D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 1 4 3 8 10 1 8 1 4 VX 11.5 VNl Dimensions (Orifice size 8mm, 10mm) VXA225m, VXA226m VQ Thread fixed: (VXA226 2 0 -04 0nly) Bracket E Port size Rc(PT) Model A B C D VXA22 52 60 02 03 , 1 4 3 8 22 11 67 77 27 VXA226 -04 2 0 1 2 28 14.5 73 83 30 Fixing with thread is also possible. 4.1-61 VVXA21