Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

ZP

C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPX How to

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Inch Threads Bore size (mm) Bore size (mm) 12 16 20 25 Dd9 (inch) l d d H B C Part No.

125

for AC, since a rectifier prevents surge voltage generation. 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC Electrical entry D DIN terminal (Type D) With connector DO Without connector * DC specification of type D and DO is only available with 12 and 24 VDC.

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

RZQ

B + First-stage stroke U MK(2) RS Q G RS H A U Mounted on different side in case of a full stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

Sine Cylinder Series REC

screw D-B5/B64 D-B59W D-G5NTL D-G5NBL BA-01 BA-02 BA-32 BA-04 Cylinder tube BD1-01M BD1-02M BD1-02 BD1-04M D-A3/A44 D-G39/K39 qBMA2-: A set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.

20

KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R1/4 14 52 46 D H1 A L1 Reference dimensions after R thread installation Low noise nozzle with male thread: KNS (mm) thread L1 A Width across flats H1 D Connection Nozzle size Part no.

Rotary Actuator/Vane Style Series CRB2

Single flat D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

Title not found

K 1 2 . 1 6 24,25 3 2 , 4 A 5 0 , 6 3 Also Available: E 12,16 2A 25 32,40 Double rod iN)c0r(u'/ a 1 2 , 1 6 20,25 32,.1O CQP2 80,100 Spr ng _ _ elurn 3/extend ; coP2 1 2 , 1 6 24,25 32,44 50 Serbs End o20 to MechanicallY the cylinder at end of Large bore size Single rod 14n 160 180 200 124 Double r c d c02w 160 200 Long stroke 32 40 50,63 a0,100 r c d (N)CO2 Anti-lateral load Serbs with wL

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

Digital Flow Switch (Integrated display type)

A to B C to D 1 L 0.01 to 1.0 -0.05 to 1.05 2 L 0.02 to 2.0 -0.1 to 2.1 5 L 0.05 to 5.0 -0.25 to 5.25 10 L 0.1 to 10.0 -0.5 to 10.5 L/min 25 L 0.3 to 25.0 -1.3 to 26.3 50 L 0.5 to 50.0 -2.5 to 52.5 100 L 1.0 to 100.0 -5.0 to 105.0 200 L 2.0 to 200.0 -10.0 to 210.0 PF2M7 40 to 4000 -200 to 4200 1 L 0.4 to 35.3 -1.8 to 37.1 Cfm x 10-3 2 L 0.7 to 70.6 -3.5 to 74.2 5 L 0.002 to 0.177 -0.009 to

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Without auto switch CRB1B J Size Rotating angle Port location Vane type Shaft type J K S T X Y Z Double shaft (Long shaft without keyway & Four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers CRB2 CRBU2 CRB1 MSU J Z Y K S T X Key Key CRJ D C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.