Compact and Lightweight

100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150 60 60 150 60 60 ZH Air consumption Suction flow rate 100 40 40 100 40 40 ZH -

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

CJ2

Standard stroke (mm) 45 stroke 59 114 Mountable (Band mounting style) Auto switch Bottom mounting style Mounting 60 stroke 67 135 Weight 75 stroke 154 100 stroke 192 125 stroke 226 150 stroke 250 Rod end nut is included in the weight. Construction (Not able to disassemble.) Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Note 6) Block, Auto switch capable, S and T only available as special. 6-14-3 4 Series NCM Specifications: Double Acting, Single Rod/Double Rod Specifications 075 (3/4") 088 (7/8") 125 (1 1/4") 200 (2") 106 (1 1/16") 150 (1 1/2") Bore size (in) Fluid Air Maximum operating pressure 250 PSI/1.7 MPa 8 PSI/0.06 MPa Minimum operating pressure 40 to 140F/5 to 60 F Ambient and fluid temperature

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

CXWM/CXWL

Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order. (-XB11) Nil None Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

08-cs1-e

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

Digital Flow Switch (Manifold type)

(The value will be 7 s for the temperature sensor output.) 7: When the temperature sensor is used, it will be 250 VAC. 8: The Device ID varies depending on the product No.

K35-OMX0029

Faster Average speed [mm/s] Measuring conditions Supply pressure: 0.55 MPa 0 50 100 150 125-250 160-300 Bore size-Stroke 200-300 250-450 320-530 Speed adjustment rotary switch set value 0 5 9 Mounting: Vertical downward Load: no-load Operating direction: Upward *1 The average speed value is the stroke divided by the full stroke time.

AC Servo Motor Driver (Pulse input type/Positioning type)

) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration time constants (msec) PE07 100 600 300 150 600 300 150 1000 500 250

Fieldbus system (DeviceNet compliant)

Product type: 12 Product code: 100 Device information Duplicate MAC ID Check Message Group2 Only Unconnected Explicit Message Explicit Message Poll/I/O Message Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) Communication speed 125 kbps 250 kbps 500 kbps Thick cable 500 m or less 250 m or less 100 m or less Max. length of Network

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

CG5-S

Relationship of liquid entry and sliding distance X Amount of liquid entry (g) 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250