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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 02 1/4 X X X 03 3/8 X X 04 1/2 X 06 3/4 X X Options 10 1 X Nil B With bracket Handle / Bonnet material S Built-in Silencer (EXH port) A Flame resistant PBT B: Packed together S: Assembled for shipping B Aluminum # For connection of the modular type FRL combination, the spacer or the spacer with

lube Air Oil Auto feed tank PT ALF400 ALT-9 Oil distributor Auto feed tank 14-13-6 Auto Feed Lube, Auto Feed Tank Series ALF400 to 900, ALT-5, -9 How to Order Operating Pressure Range Tank and line pressure ALF 40 02 0 Tank pressure (MPa) (2) (1) Option Operating allowable range Operating allowable range Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

/04/06/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P

5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge

Industrial Filter FGD Series How to Order FGD C A 03 B N 002 Made to Order Symbol Element length Description None With differential pressure indicator Symbol Nil Element length L250 L500 (L250 x 2) A B X77 With differential pressure indication switch X78 Symbol Port size Port size Rc 3/8 1/2 3/4 Accessory 03 04 06 Accessory None Bracket Symbol Nil -B Symbol Element category Symbol Element

Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard:Selectoneeachforatom. Option/Attachment/Semi-standardsymbol:Whenmorethanone specificationisrequired,indicateinalphanumericorder.

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Element classification Note) Port size 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JO printing NZ 6000SZ Printed in Japan.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Thread type Nil R, Rc N NPT F G 1 4 Port size 02 Female Female Male Female Female Male 10 1 2 14 20 1 1 Male Male Male VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications JIS Symbol Ambient and fluid temperature Fluid Compressed air 5 to 60C 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard

L tap 4 x J counter bore Related Products 4 x K 20: I-020B 25: I-032B 32: I-04A 40: IA-04 RR1 NDH10 DI A B E F G MM 45 RR1 MM NDH10 D +0.2 +0.1 E1 M C E1 R U U1 U1 A1 NX 8.6 A1 L1 L1 NX H Material: Cast iron Material: Rolled steel Material: Cast iron U (H8) Applicable bore size (mm) Part no. H G I J K L Part no.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 6000SZ Printed in Japan.

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

C76 Option Compatibility C85 NCM Standard C95 NCM-K NCM-J NCMW NCDM NCMK XB6 XB7 XB9 XC6 Description Note C S T CP95 NCM NCM NCDM NCMW NCMK NCM-J NCM-K S T C XB6 XB7 XB9 XC6 B C E R O O O O O O O O O O O O O O O O Standard Auto switch capable Double rod Non-rotating Nylon rod boot Neoprone rod boot Spring return Spring extend Rubber bumper Heat resistant Cold resistant Low speed Stainless

VFR VP7 Individual SUP Style An individual SUP spacer (VV72-P-03, 04) mounted on the manifold-block allows each valve to be supplied individually.