Ionizer

(mm) Distance (mm) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.3 MPa (14 L/min (ANR) per nozzle) 20 15 Discharge time (s) Discharge time (s) 15 10 10 1 Hz/60 Hz 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.7 MPa (30 L/min (ANR) per

Slider Type/Ball Bushing Bearing

M1 = F x L A M2 = F x L M3 = F x L CY1H10 CY1H10 CY1H10 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 1.0 2.0 Moment (Nm) 0.5 1.5 0 0.5 1.0 1.5 0 1.0 Moment (Nm) Moment (Nm) CY1H15/20/25 CY1H15/20/25 CY1H15/20/25 CY1H15,20 CY1H25 CY1H15,20 CY1H25 CY1H15,20 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Bag Filter

Specifications FGF1B-20 FGF3A-40 Note 7) FGF3B-40 Note 7) FGF5A-60 Note 7) FGF5B-60 Note 7) Model FGF1A-20 Operating pressure Operating temperature Maximum flow rate Note 1) Max. 0.5 MPa Max. 80C (For with pressure gauge: 60C or less) Common Approx. 400 L/min Approx. 1200 L/min Approx. 2000 L/min Applicable fluid Note 2) Water-soluble coolant, Weak alkali-based cleaning fluid, Industrial

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

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Note 3) The time from when the flow is changed by a step input (when the flow 5 3-Color Display Digital Flow Switch Series PFMC Flow Range Model Flow range 100 L/min 0 L/min 200 L/min 500 L/min 1000 L/min 2000 L/min 5 L/min 500 L/min 525 L/min 525 L/min PFMC7501 5 L/min 25 L/min 10 L/min 10 L/min 1000 L/min 1050 L/min 1050 L/min PFMC7102 50 L/min 20 L/min 20 L/min 100 L/min 2000 L/min 2100

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+0.3 +0.1 0 0.2 50 47 143 115 145 17 32 71 15 43 17 15 25 32 32 64 M14 x 1.5 Up to 1000 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 157 128 160 17 32 71 15 43 17 15 28 36 36 72 M14 x 1.5 Up to 1000 +0.100 0 0.1 0.3 +0.3 +0.1 0 0.2 56 53 177 144 180 20 38 78.5 15 42 20 18 32 40 40 80 M16 x 1.5 Up to 1200 (mm) With rod boot Bore size (mm) Without rod boot K KA L N P S U RR MM l Z1 ZZ1 Z ZZ e f

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

JXCx-OMT0023

50 20 50 7 20 8.

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

Guide Cylinder Series MGG

Pulling force (N) Stroke (mm) Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Rubber cap Thread size M2.5 x 0.45 x 25 l or more 2 4.9 M3 x 0.5 x 30 l or more 3 10 M5 x 0.8 x 40 l or more 3 24.5 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise.

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

High Purity Fluoropolymer

Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 15 16.5 28 14 12 6 4 20 23 36.5 17 18 9 5 F (E) 2-B L M 20 28 45 21 22 11 6 1/4 G 29 39 54 26 28 14 7 (E) (E) H L L 25 19 LQ1T62 LQ1T61 Class 2 to 5 39.5 49 69.5 36 36 18 8 Inch sizes Applicable tubing O.D.

Cylinder with Lock Series CLS

8 105 M30 x 1.5 CLQ 55 39 60 34 8 110 M36 x 1.5 70 44 67 42.5 8 125 M40 x 1.5 RR1 RLQ 70 44 67 42.5 8 125 M45 x 1.5 86 66 75.5 53 9 160 M56 x 2 MLU MLGP ML1C Clevis Pin/Knuckle Pin l L m m Material: Carbon steel (mm) d (drill through) Applicable bore size (mm) Cotter pin Dd9 L l m Model Dd9 4 x 40 l 4 x 40 l 4 x 40 l 4 x 55 l 5 x 65 l IY-12 IY-14 IY-16 IY-18 IY-25 125 140 160 180, 200 250

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGJ MGP Clevis Pin MGQ 2 x d Dd9 d Note) Cotter pin Bore size (mm) Model l Dd9 L m MGG (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 44 60 82 88 3 4 4 4 36 51 72 78 4 4.5 5 5 MGC 0.050 0.093 0.065 0.117 0.065 0.117 l m MGF L Note) Cotter pins and flat washers are included.

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Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

Digital Flow Switch (Integrated display type)

11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 -104No.PF-OMW0007-E PF2M7#S-#1/2(-L) (mm) Model A B P Q PF2M705/710/725/750S-01(-L) 94 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-N1(-L) 96 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-F1(-L) 98 14 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

force (N) Gripping force (N) 0.5 MPa 0.4 MPa 20 20 0.4 MPa 0.3 MPa 0.3 MPa 10 10 0.2 MPa 0.2 MPa 0 10 20 30 40 50 0 10 20 30 40 50 L: Gripping point length (mm) Gripping point L (mm) Gripping point L (mm) MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 Indication of effective gripping force The effective gripping force shown in the graphs to the right is expressed as F, which is the thrust of one finger