Gun Type Ionizer

IZG10-08m-01 8 (Metric) IZG10-09m-01 5/16" (Inch) AC adapter IZG10-CGm AC cord (Not included for the IZG10-CG2) AC adapter body Power supply cable (For AC adapter) 50 10 3190 100 1830 33 Model AC cord IZG10-CG1 Included IZG10-CG2 None Power supply cable (For 24 VDC wiring) IZG10-CP (32.8) 3000 Terminal semi-stripped 10 Cable Specifications 4 60 No. of cable wires/Size 4 cores/AWG26 Power

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

Compact Cylinder with Lock Series CLQ

15.0 19.6 25.4 31.2 37.0 47.3 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 -0.050 -0.093 -0.065 -0.117 17 Compact Cylinder with Lock Series CLQ Simple Joint/32 to 100 A type mounting brackets 2-D T1 T2 M W V U F B E (mm) Joint and mounting brackets (A, B type) part nos.

Thermo-con/Rack Mount Type

Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density g: 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 6 Thermo-con/ Rack Mount Type

LEC-OM069xx

2 10.1 List of Parameters1.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.2 Parameter Recording Table.10-34 1.

Power Valve: Economy Valve Series VEX5

10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

V

O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n 1 2 3 4 5 6 7 8 9 10 L1 28 44 60 76 92 108 124 140 156 172 L2 40 56 72

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

J. S. T. Manufacturing Co., Ltd.

Steam Valve

(P2) Port size: refer to table below P1 P2 F G E A 32 B D J Main port 1(A) (Back side 2(B)) C A B Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32A VND60D-40A VND70D-50A 1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (

VS7-6

6, 8, 10 Piping SYJ F.

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

MPa 5.0 MPa Rated pressure range 2.0 MPa 1.0 MPa 1.6 MPa 1.0 MPa Withstand pressure 1.5 MPa 2.4 MPa 3.0 MPa 5.0 MPa 12.5 MPa 30 MPa Power supply voltage When used as a switch output device 12 to 24 VDC 10% with 10% voltage ripple or less When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Temperature characteristics 2% F.S. (25C standard) 3% F .S.

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Fieldbus system (PROFIBUS DP compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

IZx-OMV0005

Dimensions 06 07 Energy saving nozzleIZN10E-01 06 07 High flow rate nozzleIZN10E-02 Note M3 x 0.5 depth 4 Ground terminal 2 x M3 x 0.5 depth 10 Note Note) Dimensions of the area ( shaded) on page 5 Mounting 3).

AR425 to 935

AR45 AR65 AR85 AR95 Description Model VBA Bracket Pressure gauge with limit indicator (1) B24P B25P G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) VE Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.