size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46
How to Order X214 01 S AS 2 2 0 0 Body size Option Port size Model Thread type Control method Speed Controller with One-touch Fitting Elbow Type, Metal Body/Series AS Refer to How to Order in page 15-9-43 for standard specifications. How to Order X214 2 2 1 01 06 S AS 1FG Body size Option Applicable tubing O.D.
(mm) H (Width across flat) 12 12 17 12 17 19 14 17 19 17 19 Connection thread Rc Note 1) D M Weight (g) L1 L2 Model KQG2F23-01 KQG2F04-01 KQG2F04-02 KQG2F06-01 KQG2F06-02 KQG2F06-03 KQG2F08-01 KQG2F08-02 KQG2F08-03 KQG2F10-02 KQG2F10-03 KQG2F12-02 KQG2F12-03 KQG2F12-04 KQG2F16-03 KQG2F16-04 3.2 1/8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 23.3 23.7 28.7 24.2 29.2 30.6 26.3
Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series
Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 01 (1/8), Option: S (Sealant), Lock Nut: J (Round)
Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 02 (1/4), Option: S (Sealant), Lock Nut: J (Round)
Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 02 (1/4), Option: S (Sealant), Lock Nut: J (Round)
Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: F (G), Port Size: 02 (1/4), Option: S (Sealant), Lock Nut: J (Round)
Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: F (G), Port Size: 01 (1/8), Option: S (Sealant), Lock Nut: J (Round)
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/4, Option: With Seal, Types
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/8, Option: With Seal, Types
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/4, Option: With Seal, Types
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/8, Option: With Seal, Types
Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/4, Option: With Seal, Types
mbe' ol scteno ds ror m red s ni e a rd d.lLhlevrrn! The naxrmln nJmbe I or sr.t o.s s delermried by lr toLa i!nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !
[ Kit Requires for S kit SOO'.
Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?