For Water, Oil, Steam, Air

Series VXZ22/23 Bronze NBR FKM N.C.

VEX-OMY0001

11.5Nm 2) RNPT 23 R,NPT Nm EXH.

Thermo-chiller

Hz) 20 A M5 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 HRS150-A -40HRS150-W -40Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 158F (70C) at 600 V , are used at an ambient temperature of 86F (30C).

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

CRQ2

Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port

Hydraulic Cylinders

Body mounting bolt tightening torques Bore size (mm) Mounting bolt size Tightening torque (Nm) 20 25 32 40 50 63 80 100 2.5 4 7 16 30 40 70 100 M5 M5 M6 M8 M10 M12 M14 M16 Magnetic body (steel plate, etc.) 5 Compact Hydraulic Cylinder: 10MPa Series CHKDB Construction 20 to 25 32 to 100 Without auto switch Replacement parts: Seal kits Parts list Description Note Kit components Material No

MHF2

dimension table Unit: mm A B Model A C D B 25 MHF2-8DR 11 M3 x 0.5 37 5.5 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 14.8 M5 x 0.8 54 7 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 19 M5 x 0.8 76 9 MHF2-16D1R (Finger closing port) (Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 9 through 20. 94 M5 x 0.8 23 10 MHF2

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

CM2

LX N NA NN P S Bore size (mm) D20 41 21 8 8 13 55 20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23

HRL

load 18 0 kW load 17 0 10 20 30 40 When a load is stable 0.5C 27 CH2 * For HRL300-A-20 26 Outdoor air temperature: 32C Circulating fluid temperature setting: 20C/25C (CH1/CH2) Heat load in the users equipment: 26 kW/1 kW (CH1/CH2) Power supply: 200 V 60 Hz Circulating fluid flow rate: 125 LPM/10 LPM (CH1/CH2) External piping: Bypass piping + Heat load 25 Conditions 24 Heat load fluctuation 23

EXxx-OMU0020CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 3 4 SI 5 . 11 11 No.EX-OMU0020CN 2. . 2-1 EX245 DC24 V 1 msec IP65 CE RoHS AC500 V1 FE DC500 V10 M FE -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 2 XYZ 3 () 147 m/s 12 No.EX-OMU0020CN 3. 3.1. 8 VQC4000 7 2 x M5 ( = 1.5 Nm) 2 x M5 (SI = 1.5 Nm) 4 x M* . 3-1 13 No.EX-OMU0020CN 3.1.1.

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ SS 20 10 9 2 x 4.3 through Z 2 x 8 counterbore depth 4.4 18 5 30 1 M6 x 1.0 x 5 L (Hexagon socket set screw) 450.2 450.2 48 56 25 58 6.3 5 2 x M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5 L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10 L (Hexagon socket head cap screw) 2 x M5 x 0.8 (Through-hole) (Z) 2 x M5 x 0.8 thread depth

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,

VDW

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.