VQ7-6/7-8

{Port 3 (R2) is individual and 5 (R1) is common.} 1 2 3/8 1/2 VK 1 2 4 VZ 1 2 4 VF VFR 3 5 VP4 3' 5 3 VZS VFS R1/R2 individual EXH spacer VV72-R2-04 Adapter plate for locked-up cylinder AXT602-6A VS4 VQ7 Thread type When using a locked-up cylinder with 2 valves for control, this spacer can be used by mounting on a manifold block.

Vacuum System Peripherals:

Note 2) Air is always supplied from the atmosphere.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

#0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $44 $5 $6 $7 $8 $9 %5 %6 q w e r t y u i o !

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

Air Slide Table

Sum of the Load Factors 3-4 Use is possible if the sum of the load factors does not exceed 1. n = 1 + 2 + + n 1 n = 1 + 2 + '2 + 3 + '3 = 0.25 + 0.022 + 0.011 + 0.17 + 0.24 = 0.693 1 And it is possible to use.

EX510

SW2 SW1 DIA When the extended diagnostic information is available. When the extended diagnostic informatiion is not available. Light is turned on. Light is turned off. OFF OFF 6 5 4 3 2 1 ON 10 9 8 7 6 5 4 3 2 1 ON ON ON BF When PROFIBUS DP communication is working improperly. When PROFIBUS DP communication is working properly. Light is turned on. Light is turned off.

Step Motor Driver （ Pulse input type ）

Servo is OFF (SVRE output is OFF) 2. Alarm generated 3. CLR input is ON (including the return-to-origin operation, after TLOUT ON during pushing operation) 4.

rep-modular-e

9 #7 #8 u o !2 @7 @9 #6 #3 !0 !4 !1 #9 @0 q @1 @2 @3 @4 @5 @6 i !6 r !5 #4 #0 #1 !7 !3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 #7 #8 u o !2 @7 @9 #6 #3 !0 !4 !1 #9 @0 q @1 @2 @3 @4 @5 @6 i !6 r !5 #4 #0 #1 !7 !3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Electric Actuator / Guide rod Slider

*3 *2 *2 *3 *1 Every parameter is set to the recommended condition before shipment from the factory.

CRQ2

9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(There is a piping of X, PE port in the both sides.) 12.8 34.3 23.6 15.6 32.1 15.4 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting (PE: Pilot EXH port) Applicable tubing

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

Tie-rod Type Hydraulic Cylinder

8 ) 35 + 30 (n 2) (n = 2, 3, 4 ) Different surfaces D-A44 90 + 50 (n 2) (n = 2, 4, 6, 8 ) 75 + 50 (n 2) (n = 2, 4, 6, 8 ) 80 + 50 (n 2) (n = 2, 6, 8 ) 55 + 50 (n 2) (n = 2, 3, 4 ) Same surface 75 80 1 pc. 90 10 Note 1) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

S Couplers Series KK/KKH/KK13

16 T 28 to 30 NPT, R 1/2 28 to 30 NPT, R 3/4 36 to 38 NPT, R 1 40 to 42 NPT, R 1 1/4 48 to 50 NPT, R 1 1/2 2) When a fitting is over tightened, more of the sealant material is squeezed out.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Valve stations R Port NPTF -02 2 stations Single solenoid coil is located on the opposite side of the A, B port.

Air Cylinder Series MB

8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 125 17.5 16.5 12.5 10 6 6 9 9.5 6 17.5 16.5 12.5 10 9 9.5 6 Types without air cushion have different values for auto switch mounting positions.

Floating Joint

2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1146 Floating Joint: Standard Type JA Series Flange Type: JAF20 to JAF160 JAF20 to 40 x Center of sphere J J R JAF50 to 160 Center of sphere x R (mm) Maximum operating tension and compression force (N) Standard Pneumatic