Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Thermo-chiller Series HRZ Fluorinated Fluid Type

) Heating capacity Note 3) (kW) Temp. stability Note 4) (C) 0.1 Pump capacity Note 5) (50/60 Hz) (MPa) 0.45/0.65 (at 20 l/min) 0.45/0.65 (at 20 l/min) 0.65/0.95 (at 30 l/min) 0.40/0.60 (at 20 l/min) Rated flow Note 6) ( l/min) Main tank capacity Note 7) (l) Sub-tank capacity Note 8) (l) Port size Wetted parts material Temperature range (C) Pressure range (MPa) 20 Approx. 12 Approx. 15 Rc

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

IC

Applicable in the programming function with up to 20 steps. Step 1 Step 2 Step 3 Step 4 Step 20 Step 5 . . . . . . . . . . . . .

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

This matches the controller. (1) LEG32MDGB-30 -4- 1.2 Specification Model LEG25 LEG32 LEG40 Horizonal (30,50 stroke, L=50 or less) Work load 20 45 60 kg*1 Vertical 24 27 27 Max.weight of transferred object[kg] *2 75 100 150 Pushing forceN*3*4*5 126 to 238 156 to 370 266 to 553 Actuator specifications Speedmm/s*5 18 to 250 24 to 200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing

NCA1

Quantity one set (4 pcs) of tie rods by mounting 5 Series NCA1 Cylinder Large Bore Dimension Drawings MX0 Basic style (B) P + Stroke 2-EE AA 4-DD KK MM B TH WF LF + Stroke TG ZJ + Stroke A E Bore Size (in) MM KK A AA B DD E EE LF+ P+ TG TH WF ZJ+ 500 (5") 1.000 3/4-16 1.13 5.80 1.500 1/2-20 5.50 1/2NPT 4.50 2.88 4.10 2.75 1.38 5.88 600 (6") 1.375 1-14 1.63 6.90 2.000 1/2-20 6.50 3/4 NPT 5.00

4 Port Solenoid Valve Series VQD1000

Valve station 02 2 stations Valve option 20 20 stations (Max.)

HRX-OM-K003

Necessary condition is that TEMP PV value after 60sec. is 20+/-2.0C or less. See 5.3.4 Status screen 3on page 5-4 for the details of display position.

IZx-OMR0035

Basic Performance 1) Static neutralization performance (Measured part: Front surface, Discharge time from 1000 V to 100 V) IZF21 IZF31 20 20 Discharge time sec.

modular-press-e

20 IS10M-30 IS10M-40 Residual pressure relief 3 port valve Note 3) Note 1) Contact SMC regarding pressure gauge supply for psi unit specifications.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

IC

Step 20 Step 5 P4 Set pressure P3 P2 The deviation is corrected manually (with keys).

VZ3000

fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 C4: T0425 C6: T0604 3-3-23 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Solenoid Valve Base Mounted Series VZ3000 How to Order VK Light/Surge

PEEK

Impact resistance of this solenoid valve is 150 m/s2. Vibration resistance of this solenoid valve is 30 m/s2. 3. Do not use in locations where radiated heat will be received from nearby heat sources.

Modular F.R.L. Pressure Control Equipment

20 IS10M-30 IS10M-40 Residual pressure relief 3 port valve Note 3) Note 1) Contact SMC regarding pressure gauge supply for psi unit specifications.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

155

-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 6 4

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

Clean Air Module

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.