Rotary Table/Rack & Pinion Style Series MSQ

accommodate mounting conditions Side direction A port Side direction B port A port B port Front direction 272 Rotary Table Series MSQ Rack & Pinion Style Small sizes 1, 2, 3, and 7 Small sizes 1, 2, 3, and 7 Small size and light weight A CRB2 CRBU2 B CRB1 MSU Measure CRJ mm A B C D Mass (g) 70 105 150 250 Full size (Picture of MSQB1A) Size 1 2 3 7 Model CRA1 MSQB1A 50.5 28 25 16 C D MSQB2A 56

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 20 25 32 40 50 63 80 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56

Clamp Cylinder Series CK1

Shaft: 18 Hole: 18 +0.027 0 0.050 0.093 2 x M6 Thread depth 6 Press-fit spring pin 5 x 40 L 38 17 32 37 48 24 28 +0.5 +0.1 85 61 25 70 90 Double knuckle joint CKPA100 Built-in strong magnet type / with magnetic field resistant auto switch (D-P79WSE type) 56 63 56 + Stroke 34 Speed controller needle Top width across flats 4 Cushion valve Top width across flats 4 10 13 30 3 x Rc 3/8 14 10

-2A bolt assy, NEW SY3000 MFLD*** $4.74 + Add to Quote Add To Cart Add to Cart SMC SY30M-56-3A bolt assy, NEW SY3000 MFLD*** $5.59 + Add to

-2A bolt assy, NEW SY3000 MFLD*** $4.74 + Add to Quote Add To Cart Add to Cart SMC SY30M-56-3A bolt assy, NEW SY3000 MFLD*** $5.59 + Add to

SMC SY50M-56-5A bolt, NEW SY5000 MFLD*** $7.05 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-1A base gasket kit, NEW SY5000 MFLD*** $2.14 +

PA3000/5000/PAX1000

Series PA3000/5000 Dimensions/Automatically Operated Type PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56

PFA/PFW

(4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Sectional view Standard size Minimum position Seal End face Insert bushing Body Tubing Reducer type 17-5-56 15 Series LVD High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

2/3 Port Valve

N.O. 10.2 10.4 50 VNC0 VNC02 1 4 VNC814-65F VNC811-65F 65 45 65 70 49 1260 880 15.7 P1 P2 VNC914-80F VNC911-80F 80 56 80 100 73 1800 1400 21.2 Air operated Note)The flange should be JIS B 2210 10K (ordinary type) or equivalent.

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8 10.4 56

XL

66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

3 Port Solenoid Valve/

1/8" (Without check valve) Applicable tube O.D.: 8, 5/16" (With check valve) (External pilot port) Channel 1 Channel 2 64.5 Safety limit switch (made by OMRON) Part number: D4N-9B31 M12 x 1 A 34 Applicable cable O.D. 4.5 to 7 Pg9 16.6 175.9 (190.9: For external pilot) (76.2) (75) Vent port Should be normally open. 214.1 3 x 8.5 (Mounting hole) (27.7) (Max. 3) 3 3 (106.6) 41.5 (69.5) 2 1 56

Thermo-chiller

) 23 to 113F (5 to 45C) Circulating uid Note 2) Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) 41 to 95F (5 to 35C) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions