7.5

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

) Temperature characteristics Standards Compliant with CE marking, UL (CSA) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 TSJ 1/4 Port size Rc 1/8 URJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Material Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L PSE56-: Oil proof heavy-duty vinyl cable with air tube, 3 cores, 5.1, 3 m, Conductor

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Table of Contents

VQ1 3 C6 Y 5 0 1 Cylinder port Flat ribbon cable kit with 3 m cable Series VQ1000 With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread VV5Q13-08JU21 set Manifold base no. VQ1130-5-C64 sets Valve part no. (Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

Fieldbus System

EX9-AWES For M8 EX9-AWTS For M12 EX600-ZT1 y 7/8 Inch Connector and Its Related Parts Fieldwireable 7/8 inch connector [compatible to AWG22-16] PCA-1578078 Plug PCA-1578081 Socket Power supply cable with 7/8 inch connector PCA-1558810 Straight 2 m PCA-1558823 Straight 6 m PCA-1558836 Right angle 2 m PCA-1558849 Right angle 6 m u Power Supply Cable with M12 Connector (5-pin B-coded) PCA-

Compact Cylinder with Lock Series CLQ

x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2 Head side cylinder port 16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

: Universal Type Seal method: Gasket seal For M5, 10-32UNF Applicable tubing O.D. d Y W1 AS-F D3 D1 TMH ASD M L3 L4 AS L5 A AS-FE D2 KE AS-FG AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-23 3.2 ASP 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

) (L3) L2 L1 3 2 1 16.5 Stations 5.5 D side 2-M5 X 0.8 External pilot port (Only external pilot style (R)) 2.3 21.6 35 53 5.5 300 (Lead wire) 39.5 7.8 (C3, C4, C6) (M5) Cover diameter 1.6 Cross section 0.34mm2 42.5 (11) R P 1 3 15 8 2-Rc(PT)1/8 R(EXH) port 16.3 13.4 2-M5 X 0.8 PE port 41.2 46.5 2-Rc(PT)1/8 P(SUP) port L plug connector (L) M plug connector (M) 66 71 300 (Lead wire) 55.5 56.5

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

MXW

depth 6 (Helisert) Operating direction (A) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 26 (Y) (Y) Operating direction (B) 5H9 +0.030 depth 4.5 0 (Plug: M-5P) Operating direction (B) (A) 9 8

MXW Series Long Stroke Slide Table

Table Dimensions MXW 16 Stroke: 75, 100 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 3 116 14 Scale: 30% 8 Width across flats 10 Operating port M5 x 0.8 Operation direction A 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 (Plug : M-5P) 74 36 59 32 5 8 Operating port M5 x 0.8 Y Y 33 34 33 6H9 +0.03depth 5.5 0 39 125 Operation direction B (Plug : M-5P) Operation

Vinyl Chloride Air Operated Valve

Body size Symbol Symbol diameter 22 mm 26 mm 32 mm 5 6 16A 20A 25A 16 mm 22 mm 5 6 LVP6 Symbol Pilot port thread (fitting) type A Symbol Nil 1 2 N Thread (fitting) type 6 mm One-touch fitting Rc1/8 M5 x 0.8 NPT1/8 PA B N.C. A PB Option B Applicable valve type N.C. N.O. Double acting N.O.