Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

3 Port Solenoid Valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 10-V114 10-V114A 10-V124 Note 1) N.C.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indication) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

reduces flow setting time

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02

e

12 V IC circuit 12 V 5 V 12 V 12 V Relay, PLC 24 V Yes Grommet Diagnostic indication 2-color display Grommet IC circuit A96 A93 A90 12 V 5 V 3-wire (NPN equiv.)

Air Slide Table Series MXW

V 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire 100 V or less No IC circuit Solid state auto switches marked with are produced upon receipt of order.

Auto Switch Guide

C76 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL C85 C95 CP95 Auto Switch Mounting Bracket Part No.

Metal Seal/Rubber Seal Series VQ Body Ported

24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Plug lead Cassette Plug-in Series VQ1000 Latching Latching Latching Latching Latching VQ131 1.0 0.84 P. 2-4-10 P. 2-4-8 VQ040 0.50 0.36 Series

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQC VQZ SQ VFS VFR +24 V +24 V VQ7 Power supply for output Power supply for output 0 V 0 V Power supply for the input and for the control unit of the Gateway Power supply for the input and for the control unit of the Gateway +24 V 24 V Caution 1. Take measures to avoid applying repeated bending force or pulling force to the cable.

MXW

F9PV 3-wire (PNP) F9B F9BV Relay, PLC 2-wire 12 V 24 V Yes Grommet F9NW F9NWV 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Solid state switches marked with are produced upon receipt of order.

AC Servo Motor Driver

(Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

CG5-S

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

Modular F.R.L. Unit

+ AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to

Mechanically Jointed Rodless Cylinders

(mm) Fitting type Fitting model Cylinder model size Connection thread Cylinder model size Connection thread Male connector Male elbow Male connector Male connector Male elbow 4 KJH23-M5 KJL23-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KJL04-M5 KQ2L04-M5 KQ2S04-M5 KQ2L06-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KQ2H04-M5 KQ2L04-M5 KQ2S04-M5 KQ2H06-M5 KQ2L06-M5 KQ2S06-M5 KQ2H23-01S KQ2L23-01S KJH04-01S KJS04-01S

MHZ2/MHZJ2

Black] Indicator light/Display method 23 2 Color Indicator Type Solid State Switches /Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W, D-F9 WV (with indicator light) D-F9NW Auto switch part no.

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

Hygienic Design Cylinder Series HY

DC Auto switch model Lead wire length (m) Electrical entry Wiring (Output) Load voltage Indicator light Pre-wired connector 3 (L) 5 (Z) Applicable load 0.5 (Nil) Type F6N 3-wire (NPN) 5 V 12 V IC circuit Yes Grommet Solid state switch Relay, PLC F6P 24 V 3-wire (PNP) F6B 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of orders.