4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Type 20 Manifold) SYJ3 2 5 M 1 M3 0 Body ported Base mounted (4 port) 2 SYJ3 3 5 M 0 (Manifold use only) Base mounted (5 port) SYJ3 4 M 2 0 5 4 port Port size Coil specifications Manual override Nil Standard Nil: Non-locking push type Nil: Without sub-plate With power saving circuit T (24, 12 VDC only) Power saving circuit is not available in the case of W type.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

VQ

M plug connector, With lead wire and light and surge voltage suppresser. M M plug connector, Without connector, With indicator light and surge voltage suppressor MO G Grommet L plug connector Note) Grommet: No latching, AC and large flow capacity.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

M L2 Pressure range Option 3 Symbol Description ISE70 0 to 1 MPa ISE71 0 to 1.6 MPa Symbol Description Nil Operation manual Y None K Operation manual + Calibration certificate Piping specification Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 T Calibration certificate Option 2 Symbol Description Nil None *1 ISO 1179-1 compliant Output specification*1 A Bracket A (Interchangeable with

Series: 25A-ZSE20, Rated Pressure Range: B (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specifications: M (SI Unit Only), Piping Specifications: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)

VXZ

Normally open VXZ 2232 02 1 G N.O.

Digital Flow Switch Series PFA For Air Series PFW For Water

Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 1.3kg (without lead wire) Equivalent to IP65 2.0kg (without lead wire) 1.1kg (without lead wire) 1 1/2 2 1 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10).]

ZSE F/ISE

or more (at 50 VDC) between all lead wires and enclosure 10 to 500 Hz with 1.5 mm amplitude or 98 m/s2, whichever is smaller 980 m/s2 in X, Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02: R 1/4, M5 x 0.8 T2: NPT 1/4, M5 x 0.8 5-wire oil

HRX-OM-R016

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R016 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-W038

Y-strainer Rc1/2 #500 to 1000 Install either the strainer or filter. If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 2 Filter Rc1/2 20m HRS-PF003 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #1000 Install either the strainer or filter.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R

F/ISE

3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1

Guide Table Series MGF

NO m: Refer to "Operating Conditions (Allowable eccentric load)" on page 12. m < Wo NO mo Wo m Wo mo < Wo YES mo Wo YES m Wo Model selected Allowable rotational torque Non-rotating accuracy T T (Nm) Non-rotating accuracy Bore size (mm) Stroke (mm) Bore size (mm) 40 0.08 100 75 50 30 63 40 0.06 3 4 5 7 100 63 0.05 10 12 16 22 100 13 17 22 30 Note) The value given for the non-rotating

VT325

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

ZSE5/ISE5

I The dual output applies to NPN, -O~P7:~iP~tio~n~-'-~p~a~m~No~.-.~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !