Pilot Operated

f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5 49.5 N 64 70.5 84.5 Q 92 92 95 R

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

N Without magnet and rail Type N (Without magnet and rail) Auto switch can not be mounted on. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 pcs. 1 pc. n pcs.

MXF

0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Sine Rodless Cylinder Series REBR Direct Mount Type

Z + Stroke Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27

Low Profile Slide Table Series MXF

length) N 2 ( 1): The number of pitches 21 7 J I Z 3 ZZ Max. 9 Note) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Digital Flow Switch (Integrated display type)

(Page 74) 8010 0x1F4A 0 R PD conversion equation : b F32 N 8020 0x1F54 0 R Instantaneous flow peak value S16 N -200 to 4000 The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Instantaneous flow bottom value S16 N -200 to 4000 Accumulated flow value measured value (temporary value) S16 N 0 to 9 1 R

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E F G H Without lock With lock 50 4 15 80 25 100, 150 40 50 200, 250 6 2 200 180 300, 350 8 3 300 280 400, 450 10 4 400 380 500 12 5 500 480 214 275 6 80 21 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric

Industrial Filters

29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

MGC

2 pcs. 1 pc. n pcs.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22

MLGP

2 pcs. 1 pc. n pcs.