Low-Speed Rotary Actuator

3-wire(PNP) Grommet Yes M9PWV M9PW (2-color indicator) PLC 2-wire 12V M9BWV M9BW M9NAV*1 M9NA*1 3-wire(NPN) 5V, 12V IC Water reisstant circuit 3-wire(PNP) M9PAV*1 M9PA*1 (2-color indicator) 12V M9BAV*1 M9BA*1 2-wire 3-wire auto switch 5V A96V A96 NPN equiv.

Modular F.R.L. Unit

separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 28 through 30 Micro mist separator Series AFD AFD20 1/8, 1/4 Bracket AFD30 1/4, 3/8 0.01 Float type auto drain AFD40 1/4, 3/8, 1/2 3/4 AFD40-06 Pages 31 through 33 21 Air Filter AF10 to 60 How to Order 03 30 2R BD AF F Optional specifications Accessory Air filter Body

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

3.7 Interfaces . 3 -21 3.7.1 Internal connection diagram . 3 -21 3.7.2 Detailed description of interfaces . 3 -22 3.7.3 Source I/O interfaces . 3 -24 3.8 Treatment of cable shield external conductor . 3 -25 3.9 SSCNET cable connection . 3 -26 3.10 Connection of driver and servo motor . 3 -28 3.10.1 Connection instructions . 3 -28 3.10.2 Power supply cable wiring diagrams . 3 -29 3.11 Servo

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/4 VF5;2;-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;2;-;;1-03 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/4 VF5;44-;;1-02 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF5;44-;;1-03 VF5000 1(P), 5(EA), 3(EB) 3/8 4(A), 2(B) 1/2 VF5;44-;;1-04 1(P), 5(EA), 3(EB) 1/2 1(P), 5(R), 3(R) 3/8 Type 20 manifold base 1(P), 5(R), 3(R) 1/2 Type 21

MU

For details, refer to page 7-9-36. 7-8-21

MU

For details, refer to page 7-9-36. 7-8-21

Series VQ Base Mounted Metal Seal/Rubber Seal

() 7B 3 rows 9 to 12 stations (+) () 8A Sequence 3.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 20 20 10 10 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 2 2 32 D32 1 1 0.5 0.4 0.3 0.5 0.4 0.3 -X 25 20 25 20 0.2 0.2 Individual -X 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang

HRX-OM-W038

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-R016

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

EXxx-OMN0035CN

~21 14~21 DC24 V DC24 V 222324 0 V 222324 24 V 1325 FE 1325 FE FE FE OFF ON SI -49No.EX-OMN0035CN-A (2)EX600-DMF EX600-DMPF EX600-DMNF 1 24 V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 0 V() 24 V() 2 0 4 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 5 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 6 3 0 V() 24 V()

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 !4 !5 !6 !7 !8 !

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM. AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !

High Power Cylinder Series RHC

30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 40 8 10 1/4, 3/8 500 6 40 =0.7 30 40 1000 1500 2000 2500 3000 3/812 3/812 3/812 3/812 3/812 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Since the cushion capacity may be exceeded in high speed, high load operation, confirm the maximum

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

Series AS-FM/AS-M/ASD-FM

Note 3) 3/16" and 3/8 are POM, stainless, and brass (electroless nickel plated).