VHK L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.
L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.
side) 65 70 75 55 D-M9AV 55+30(n2)/2 n=4, 8, 12, 16 Other qty. 65+30(n2)/2 n=4, 8, 12, 16 70+30(n2)/2 n=4, 8, 12, 16 75+30(n2)/2 n=4, 8, 12, 16 65 95 2 switches (Different side) 60 75 80 85 2 switches (Same side) 90 100 105 110 D-A3 D-G39 D-K39 65+30(n2) n=2, 4, 6, 8 Other qty.
(For the 100 L/min types, the piping length should be 11 cm or longer.)
9.5.1 (P.30) 3 F0 Address(0) 0 4 F0 DATA(H) 9.5.1 (P.30) 5 F0 DATA(L) 6 F0 7 F0 815 F0 H= L= 46 - 11
Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check . 13 3.6 Parameters and Step data
5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.
70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32
10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0 2-11 counterbore depth 6.3 W X Y T TT U UU V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread
30 MY2HT25 MY2H 20 20 MY2HT25 MY2HT25 20 MY3A MY3B MY2HT16 10 10 10 MY3M MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load
Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !
(For the 100 L/min types, the piping length should be 11 cm or longer.)
-15 -20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100 M8 x 60L x 65L x 70L x 75L
Table 10 shows the part number of the special angle adjustment tool and Table 11 shows the dimensions of the special tool. Angle adjustment using the special tool Table 10. Part number of special angle adjustment tool Size Part number 10 P8910195 20, 30 P8910295 50 P8910495 Table 11.
0 1 0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 110 - 22.3 Installation Remote register
, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U
(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.
20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150 to 700 M26 X 1.5 25 9 146