Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5

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Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Support Guide/11-LEFG Series

58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207

C95

GD GC EE SW EE SW1 KK WA WA WB B D B ??

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Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For monifold mounting) One-touch fitting (A, B port) (3.2) 32.3 (Light/surge voltage suppressor) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" + 23 20 11 2-2.6 (For mounting) 3 28.1 [35.1] 12.7 P R1 15 R2 1.4 (PE port) M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): SYJ5220-L-M5 M plug connector (M): SYJ5220-M-M5 DIN

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc. MQQ M n n pcs.

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(b) Vcc B-1 Brown 12 5 5m GND A-1 Black 13 8 8m* A B-2 Red 7 A A-2 Black 6 A 10m* B B-3 Orange 9 B 15m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 C 20m* SD-(TX) A-4 Black 10 Black 3 * Produced upon receipt of (c) Signal name Terminal No.

Plug-in/Plug Lead: Single Unit

A Unused A Unused A Unused A Unused A Unused VQC A B A B A B A B A B A A A B A B A B A A A A SQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 VQ0 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ4 VQ5 ADDRESS NO. STATION NO.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8 D-H7 A B 12 Hs 14.5 Courtesy of Steven Engineering

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

Compact Rotary Actuator Series CRQ2

D: Shaft dimension S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU CA CB F H J JA JB Size Rotating angle 20 30 40 90, 180, 360 63 (11) 14 34 14.5 30.4 7 4.7 10 2.5 30 M 8 x 1.25 11 6.5 50 25 90, 180, 360 69 (11) 14 39 16.5 49 16 34.7 8.1 4.9 12 3 32 M10 x 1.5 14 8.5 68 30 90, 180, 360 78 (13) 16 47 18.5 55 16 40.4 8.3 5.2 15 3 36 M10

Table of Contents

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

Booster Regulator/Air Tank

11 4 x 11 32 32 120 120 Drain valve Drain port Rc1/4 180 180 312 460 1036 Air Tank VBAT-X104 Dimensions Material: Stainless steel VBAT20S1-T-X104 Safety valve/Pressure gauge set (Supplied with product) Connected to VBA20A, 40A Connected to VBA22A, 42A ARJ Tank IN port Rc1/2 AR425 to 935 Booster regulator IN port Booster regulator IN port C C ARX EXH: C EXH: C AMR (A) D (A) (B) (B) OUT OUT

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40