ITV

valve EXH ITV ITV 11 8.5 11 8.5 SUP OUT SUP OUT IC EXH (3) EXH (3) 13.5 13.5 ITVX Dimensions not shown are same as on page 826.

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

Table of Contents

Model A side B side JIS Symbol A relay output module of devices up to 110 A B is available for control VAC, 3 A. 4(A) 2(B) A B N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) B side passage symbol: Green B side manual override: Green Tie-rod base manifold (For SV1000/2000/3000/4000) 1(P) 4(A) 2(B) A side coil A side spool valve B side spool valve N.O. valve N.O. valve 1 2 SV B00

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size B C D A K J H G F E Q T N P K L M B AC10B AC20B AC25B AC30B

Valve Single Unit

Gasket Series Round head combination screw SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated) Gasket SY3000-11-25 SX5000 SY5000-11-15 SX7000 SY7000-11-11 1-6-67 SX7000: SS5X7-42PStations -02/C10 1 4 Rc (Pitch) 2n-One-touch fittings (A, B port) (A, B port) Applicable tubing O.D.: 10 2-M5 x 0.8 (Pilot EXH port) (Pitch) (Mounting hole) 6-Rc 1/4 Manual override

KQ2

(inch) Mass (g) d Applicable fitting L M2 M1 Model a b Applicable fitting KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8

EX510-GDN1.eng

For dual power supply use B.

mlu

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 D 16.5 18 21 26 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

PROFIBUS DP Compatible Fieldbus System

connector (5-pin, socket, B-code) of GW unit.

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Booster Regulator/Air Tank

END 5 Booster Regulator Series VBA Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure fromdrive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

B A B A B A B Hs Hs Hs Hs 32 40 50 63 32 40 50 63 45.5 5.5 46 6 43 3 51 11 31.5 32.5 38.5 35 38 34 52 8 52.5 8.5 49.5 5.5 57.5 13.5 35 36 42 38.5 41.5 37.5 56 13.5 56.5 14 53.5 11 61.5 19 41 42 48 44.5 47.5 43.5 61.5 16.5 62 17 59 14 67 22 47.5 48.5 54.5 51 54 50 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

1.1

A 220 4 x 11 (mm) A B 240 C 14 Transformer part no.

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

•

/>B ' C . 0 E . F.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Discharge port (FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.