CNG

TS TT TV TW TX TY XA XB J 0.025 0.047 11 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 10 5.5 25 39 28 3.2 42 28 47.6 3 12 16 M4 x 0.7 35.8 0.025 0.047 11 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 10 5.5 30 43 33 3.2 42 28 53 3 12 20 M5 x 0.8 39.8 0.032 0.059 0.032 0.059 10 54.5 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 10 6.6 35 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5

Auto Switch Guide

, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5 x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket

Compact Cylinder with Lock Series CLQ

CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

MM Bore size (mm) NB NDh8 24.5 20.5 20.5 GC F D BB A 6 10 16 NN Z 85.5 82 83 T 3 CA GA BA CB GB 5 5 S NA H 28 28 28 M3 x 0.5 M8 x 1.0 15 15 15 7 9.5 9.5 10-0.022 0 8-0.022 0 57.5 54 55 15 15 18.3 12 18.3 14 20 3 4 5 17 17 20 8 8 8 12 5 5 11 11 11 M10 x 1.0 M4 x 0.7 12-0.027 0 M12 x 1.0 M5 x 0.8 With air cushion Air cushion type is not available for 21-/22-CJ2.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

SMC Pneumatic Clean Series

cover port location Axial direction (R) A F NA NB BB 0 -0.3 BA 0 -0.3 S + Stroke H Z + Stroke (mm) 11 11 11 3 CA GA BA CB GB GC F D BB A 3 NN Z T S NA M3 x 0.5 MM Bore size NB NDh8 8-0.022 H 9.5 9.5 7 0 18.3 15 15 15 15 15 16 10 6 28 28 28 17 17 20 M8 x 1.0 57.5 83 82 85.5 20.5 20.5 24.5 18.3 12 20 14 5 4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

35H9 10 26H9 86.7 71.4 56 22 158.1 130 12 5 3 7.5 32 28 18 11.5 72.9 20 (mm) J JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

CJ2X/CUX/CQSX/CQ2X/CM2X

auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed Piston rod size 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female thread Male thread Rod end thread JIS Class 2 Rod end thread tolerance Stroke tolerance Port size Vacuum port, Relief port +1.0 0 mm M5 x 0.8 M5 x 0.8 10-3-16 16 Series 10-,

CJ2X/CUX/CQSX/CQ2X/CM2X

auto switch: 10 to 60C (No freezing) Ambient and fluid temperature 1 to 200 mm/s 0.5 to 200 mm/s Piston speed Piston rod size 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female thread Male thread Rod end thread JIS Class 2 Rod end thread tolerance Stroke tolerance Port size Vacuum port, Relief port +1.0 0 mm M5 x 0.8 M5 x 0.8 10-3-16 16 Series 10-,

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

MHF2

0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5 Mounting thread

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 29.4 12 17.5 12.9 29.6 33.8 28.8 7.8 11.7 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 32.5 13 13.7 20.6 34.6 6 ASD330FM-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 10.6 14.2 11.8 12 32.1 27.1 R 1/8 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430FM-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430FM-02-08S

Air Slide Table Series MXW

Width across flats 10 Operating port M5 x 0.8 6 x M5 x 0.8 thread depth 9 Note) 6H9 + 0.030 0 depth 5.5 A Operating direction (Insert) 7 (Plug: M-5P) 74 36 59 5 32 8 Y Y 33 34 33 Operating port M5 x 0.8 B Operating direction 39 125 6H9 + 0.030 0 depth 5.5 (Plug: M-5P) Operating direction 10.5 B A 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A 3 Cross section AA 3 x H G 4 x M6 x 1 thread depth 12

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

section 0.34mm2 Manual override 42 36 3 SX VK 69.5 (Metal seal) 67 (Rubber seal) (47.5) VZ VF SMC VFR 46.5 40.5 VP7 R1 R2 A, B port 20 14.6 12 10 10 P VP4 PE port 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 13.4 13.4 1.1 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ VQ4 VQZ 0 1 M plug connector (M): VQZ115 (R)lMl01 L plug connector

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Low Profile Air Gripper Series MHF2

Top mounting (Body tapped) l Max. tightening torque Nm Max. screw-in depth l mm Model Bolt MHF2-8D MHF2-12D MHF2-16D MHF2-20D M3 x 0.5 0.95 7 M4 x 0.7 2.2 10 M5 x 0.8 4.5 12 M6 x 1 7.8 15 Operating Environment Caution Use caution for the anti-corrosiveness of the linear guide section.