Power Clamp Cylinder

158.5 78 M10 x 1.5 22 13 36.5 15.8 M8 x 1.25 10 76 13 19.6 199 137.5 18 80 214 113.7 21 50 20.8 M10 x 1.5 12 154 185.8 12 530.9 M12 x 1.75 30 Bore size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

20 or less Single 1 8 1 4 VFR2200 VFR2210 10 20 or less Double 1 8 1 4 1 8 1 4 1 8 1 4 Closed center VFR2300 VFR2310 5 30 or less 0.43 (0.45) Exhaust center VFR2400 VFR2410 5 30 or less 0.43 (0.45) Pressure center VFR2500 VFR2510 5 30 or less Note 1) [ ]: Denotes the normal position.

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

Low Profile Slide Table Series MXF

F A A Lr MXF8 Lr = 20 mm 0.08 0.04 0.03 MXF8-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXF8-30 0.06 MXF8-10 MXF8-20 MXF8-30 0.03 0.02 MXF8-20 0.04 0.02 MXF8-20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 MXF12-50 0.06 Table displacement amount (mm) Table displacement

•

Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8." "L __--+_-" "'.-= .. ,L)_+--, (" =-,12 '6 (" =4 ',,,2'-.. , ,,,6 ::" ) _~ Wlth2pcs (DiHe!'

HRX-OM-W032

30 25 25 Cooling capacity [kW] Cooling capacity [kW] 20 20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz

21

D 8 E 20 F 13 FL 10.5 G 6 H 31 H1 5 I 27.9 KA L 30 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 17.5 15 17 9 30 10 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 30 17.5 15 17 9 30 10 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 30 23.5 20.5 22 10 38 15 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 39 MM M8 x

mb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

70astamb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

MGQ

30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size 32 to 100: MGQM, MGQL 4-YY depth YL W + Stroke 4-NN through 4-MM

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

Sine Cylinder Series REC

thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26 22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32

Sine Cylinder Series REC

thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26 22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32

Sine Cylinder Series REC

thread length FL AL NA K A U F N N ZZ + Stroke Z + Stroke S + Stroke L H RR (mm) A AL F FL G H H1 I K D B1 CX L KA CD E MM N Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 20 18 15.5 13 8 13 10 9 10.5 10 20 41 5 33.5 5 30 6 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 10.5 10 20 45 6 37.5 5.5 30 8 32 M10 x 1.25 26 22 19.5 13 12 17 10 9 10.5 11 22 45 6 46.5 5.5 30 10 40 M14 x 1.5 32

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

VQZ1000/2000/3000

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Weight Allowable Moment MY3A, MY3B/M1 MY3A, MY3B/m1 MY3A, MY3B/M2 MY3A, MY3B/M3 30 20 50 40 30 200 100 50 100 20 40 30 10 MY3A 3B63 MY3A 3B63 50 40 30 10 20 5 4 3 2 MY3A 3B63 10 5 4 3 MY3A 3B63 20 MY3A 3B40 MY3A 3B40 MY3A 3B40 Load weight kg 5 4 3 Moment Nm Moment Nm Moment Nm 1 2 10 MY3A 3B40 0.5 0.4 0.3 0.2 1 2 MY3A 3B25 MY3A 3B25 5 4 3 MY3A 3B25 MY3A 3B25 0.5 0.4 0.3 1