10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Industrial Filters

574 70 634 574 70 665 3/8, 1/2, 3/4 3/8, 1/2, 3/4 A (L250) A (L250) 315 70 375 315 70 408 FGDT FGDF FGDT FGDF B (L500) B (L500) 574 70 636 574 70 665 28 B Industrial Filter FGE Series FGD How to Order FGE FGE FGG FGE S A 10 B N A 002 G1 FGES/FGEL type (V-band type) FGA Material Symbol Option FGC Symbol Body Gasket/O-ring NBR FKM Pressure gauge type G46-10-02M (Brass at wetted parts) G1 G2

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

SZ3000

13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 15 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) B1 2 Scale: 37% 2n1-M5 x 0.8 (A, B ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2

76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

RLQ

L D d m t d H B C l IY-G04 IY-G05 C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 9-12-19 20 Simple Joint: 32 to 63 Type A Mounting Bracket 2-D T1 T2 M W V U F B E (mm) Joint and Mounting Bracket (Type A, Type B) Part No.

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

Table of Contents

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Cylinder with Lock Series CLS

Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Mechanical Valves Series NVM, NVFM, NVZNI

4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6

IIIIIII

4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m m ) O T 0 039 in (1mm) T.T, 0 256 in (6

Pin Clamp Cylinders

(Cylinder stroke) 0 0.05 d 10 (Clamp stroke) Q Q SR Port side K B 120 C Mounting surface 8 to 10 26 12 48 67 10.5 (9) Port side C Mounting surface 14.5 15.5 30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

180

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

PA3000/5000/PAX1000

Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.