Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

AZ1000

MPa) 5 to 150 psig (0.034 to 1.0 MPa) (Source pressure 1000 psig or less) 1) Preset to 250 psig (1.7 MPa) 2) 2 to 100 psig (0.014 to 0.7 MPa) Delivery pressure Select compatible materials of construction for the gas Gas Vacuum to 1700 psig (11.7 MPa) Source pressure 2550 psig (17.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 3) 0.65 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Plate Cylinder

12 14 DH 11 13 13 17 19 DI 17 22 27 32 38 DJ 7 10 10 14 16 Part no.

SMC Electronic Switch Series Variations

It takes 10[ms] to switch the channel.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

Stainless Steel 316

Connection thread NPT 10 Effective area Note 2) (mm2) Note 1) M Weight (g) A D L (inch) D Applicable tubing 19.3 7.4 4 22.3 KQGH03-32 10-32UNF 18 5/32 10 19.9 10 5.6 12 24 KQGH03-N01S NPT1/8 M A L 21.1 12 4 24.1 KQGH07-32 10-32UNF H 13 20.2 18.8 12 1/4 24.3 12 KQGH07-N01S NPT1/8 10.4 Connection thread 20 18 25.8 KQGH07-N02S NPT1/4 26.4 18 30.5 14 KQGH09-N01S NPT1/8 (In case of R) 22.7 20.9

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Fieldbus system DeviceNet TM compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Table of Contents - Tubing

I.D. 435 4 6 8 10 12 TFU0425-2-Length per roll-10-X4 TFU0604-2-Length per roll-10-X4 TFU0805-2-Length per roll-10-X4 TFU1065-2-Length per roll-10-X4 TFU1208-2-Length per roll-10-X4 2 to 8 2 to 8 2 to 6 2 to 3 2 to 3 2.5 4 5 6.5 8 290 Max. operating pressure 145 0 4 32 68 104 140 W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) Operating temperature F Reel

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic