4/5 Port Solenoid Valve

(A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 8% to +10% 12 VDC: 6% to +10% 3 position pressure center 3 position pressure center (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) Made to Order Made to order specifications (Refer to page 557 for details.) 537 5 port solenoid valve Series 10-

Air Cylinder

Bore size B C GA FB NA WA S Z 10 15 17 7.5 14.5 21 14.4 66 122 16 18.3 20 7.5 19 21 14.4 67 123 70 Air Cylinder: Standard Type Single Acting, Spring Return/Extend RoHS CJ2 Series 6, 10, 16 How to Order CJ1 S 45 B CJ2 16 Z CJP CJ2 CJ2 45 16 B CDJ2 M9BW S B Z With auto switch JCM q w e r t y u i o !0 !

AC Servo Motor Driver (Network card type ）

CN4 (Battery connector) Refer to section 11.8 driver (Note) CN2L (Note) CN2L (for using serial encoder) (for using A/B/Z-phase pulse encoder) 2 6 10 2 6 10 LG 8 4 LG 8 4 PBR PSEL PAR PZR MRR2 MXR2 1 5 9 1 5 9 P5 3 7 P5 3 PB 7 BAT PA PZ MR2 MX2 Note. CN2L cannot be used. Connect the encoder cable to CN2. 3 13 3.

Table of Contents

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

Compact Cylinder

Acting, Single Rod Series CQ2 12, 16, 20, 25, 32, 40, 50 Standard Large Bore Size Long Stroke Non-rotating Rod Axial Piping Anti-lateral Load With End Lock Water Resistant Auto Switch Made to Order With Auto Switch How to Order Without auto switch 10 20 CQ2 B S 12 to 25 Without auto switch CQ2 B 32 10 Z S 32 to 50 32 10 Z S M9BW B CDQ2 With auto switch With auto switch (Built-in magnet)

NCQ2/CQ2

X L1 "C1" dim. not applicable Basic Style NCQ2 CQ2 H NCQ2 CQ2 A B 5 st 8.5 8.5 9.5 10 L Bore size (mm) 5 st 30.5 32 34 37.5 O N M K I E D C H Q Z C 10 st 27 28.5 29.5 32.5 5 st 22 23.5 24.5 27.5 10 st 40.5 42 44 47.5 10 st 13.5 13.5 14.5 15 inch 12 16 20 25 3.5 3.5 5.5 5.5 15.5 20 25.5 28 5 6 8 10 32 38 47 52 25 29 36 40 6 8 10 12 6 8 7 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 7.5 8 9 11 10

Electric Actuators

Bottom Mount LG1H20/ Without coupling LG1H21/ With coupling 95() 95(160) A() B() 95() 95(170) A() B() 10 95(140) 95(150) 10 30 30 A A B B A B B A Stroke Stroke Stroke Stroke 700 570 700 580 655 100 645 100 800 670 800 680 155 755 200 80 745 145 200 70 900 770 900 780 855 255 300 180 245 845 300 170 1000 870 1000 880 355 955 400 280 945 345 400 270 1200 1070 1200 1080 1155 455 500 380

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

10-SS5Y5-45Stations DC4, N3 C6, N7 C8, N9 10-SS5Y5-45Stations UC4, N3 C6, N7 C8, N9 Button for DIN rail release 26 25 P = 16 (Pitch) 17 26 17 P = 16 (Pitch) 14.5 32 Button for DIN rail release 14.5 32 15.5 31.5 15.5 31.5 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting

Table of Contents

Bottom Mount LG1H20/ Without coupling LG1H21/ With coupling 95( ) 95(160) A( ) B( ) 95( ) 95(170) A( ) B( ) 10 95(140) 95(150) 10 30 30 A A B B A B B A Stroke Stroke Stroke Stroke 700 570 700 580 655 100 645 100 800 670 800 680 155 755 200 80 745 145 200 70 900 770 900 780 855 255 300 180 245 845 300 170 1000 870 1000 880 355 955 400 280 945 345 400 270 1200 1070 1200 1080 1155 455 500

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

5-Port Solenoid Valve

B Circular Connector B EX500 C Individual EXH (SUP) spacer assembly EX600 C EX250 SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

Smooth Cylinder/Low Speed Cylinder

A B A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 6 3 1 0 0.5 6.5 2 4 11.5 10 3 0 0 4.5 0 2 9.5 8 3.5 1.5 5.5 3 1 0 0.5 6.5 2 4 11.5 10 3.5 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 3 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 9 7 6 6.5 4.5 8 10 17.5 16 4.5 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 8 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 6.5 7

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 18 A 4 A 4 A 4 A 4 39.3 63.3 79.8 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable tube O.D.: 8 10 12 2n2-Rc 1/4, 3/8 [4 (A), 2 (B) port] 2-One-touch fitting

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

Table of Contents

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

Electric Actuator/Slider Type

A 10 B 15 C 20 Produced upon receipt of order (Robotic cable only) Refer to the specications Note 2) on pages 9 and 10.

Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S