3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Vibration resistance VQ Model VQ4 (1) Response time (ms)(2) Weight (g)(3) Configuration Model Effective area (mm2)(Cv) Series Standard: 1W High pressure: 1.5W High pressure: 1W Low wattage and AC VQZ Metal seal 3.6 (0.2) VQZ1150 12 or less 15 or less 37 Single Rubber seal 6.3 (0.35) VQZ1151 12 or less 15 or less VQD 2 position Metal seal 3.6 (0.2) VQZ1250 10 or less 13 or less Double Rubber

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Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

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Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

Rotary Table: High Precision Type

Please refer to Table 13 on page 37 for where to apply grease and the grease to use. 11 - Auto Switches Precautions Design / Selection 1. Confirm the specifications. Warning If the product is used with excess load applied or beyond the specification range, this may cause the product to break or malfunction.

2–4

Auto Switch Weight Auto switch internal circuits Unit: g D-F9NV D-F9NV D-F9PV D-F9BV Model DC (+) Brown [Red] 0.5 7 7 6 Lead wire length (m) 3 37 37 31 Switch main circuit Switch main circuit Switch main circuit OUT Black [White] 5 61 61 51 DC (-) Blue [Black] Auto Switch Dimensions Unit: mm D-F9V D-F9PV Mounting screw M2.5 x 4 Slotted set screw 4.3 DC (+) Brown [Red] Indicator light 2 OUT

Plug-in/Plug Lead: Single Unit

31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 14 5 1 3 12 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

2-Color Display

g 73 g 77 g 35 g 75 g 79 g 37 g 70 g 74 g 32 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Optional Part No.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

KK/KK13

Stainless steel FPM NBR NBR Stainless steel Stainless steel NBR Brass NBR Electroless nickel plated Electroless nickel plated 4 S e r Dimensions/Plug (P) Male thread type A T L H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37

AC Servo Motor Driver (Pulse input type/Positioning type ）

STARTUP 41 to 4-37 4.

Thermoelectric Bath

Fan (Air OUT) DC cable RUN LED (Green) Fan Alarm output connector 0.77 (19.5) 3.8 (96) Signal cable Model no. label 3.4 (86) 0.87 (22) 1.45 (37) 2.67 (68) Display/Operation panel Signal connector 4.6 (116)0.79 (20) Air OUT 5.4 (138) 3.9 (99) 2.4 (62) 1.4 (36) THERMO-CON 3.7 (95) SIGNAL WARNING Air IN Air IN 6.7 (170) 7.1 (180) ALARM PV WARNING SV OUT1 OUT2 DC AL1 DI RDY COM AL2 OUTPUT FUNC

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 63.5+ST ST 50+ST 8 5.5 16 2 x 3.2 through 15+1/2ST 2.75 19 2 x 6.5 counterbore depth 3.3 14 1 OUT 3 3 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M3 x 0.5 x 12.5 L and M3 x 0.5 (Hexagon bolt) (Hexagon nut) 7 2 x M5 x 0.8 thread depth 4.5 IN (Piping port) 2 x M3 x 0.5 (Through-hole) 2 x M3 x 0.5 (Through-hole) 4 x M5 x 0.8 thread depth

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

VCS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil insulation type Class H VX3 Power consumption (W) 50/60 Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power (VA) 50/60 Hz VXA Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) For low pressure

SYJA3000

Ported Base Mounted 2 position single: SYJA5120-M5(-F) 2 position single: SYJA5140-01 (Mounting holes pitch) 41.5 (Mounting holes) 4.3 2M5 X 0.8 (Pilot port) 1 (Non-locking) Manual override A B 15 5 11 A B M5 X 0.8 (pilot port) 10 24 A B 19 R P 2.6 23.5 237.5(mounting holes pitch) Bracket SlA (Mounting holes for manifold) (Mounting holes) 4 47 42 (Non-locking) Manual override VlA 30 24.5 37

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. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .

Battery-less

Make sure workpieces mounted on the fingers do not interfere with other workpieces or the facilities around the fingers. *2 Secure the motor cable so that the cable is not repeatedly bent. 2.6 2.6 1.2 37 1.2 1.2 37 1.2 8 x M4 x 0.7 x 4 24 20 +0.025 0 2 x 3H9 ( ) depth 3 13.5 0.05 26 26 5.5 5.5 151 Battery-less Absolute Encoder Type Gripper LEHF Series Battery-less Absolute (Step Motor 24

C76

Note Bore (mm) Every set includes: 1 rod seal 1 seal retaining washer 1 retaining ring C76-32PS 32 C76-40PS 40 6-10-37 38 Series C76R Specifications Bore size (mm) 32 40 12 14 Piston rod dia.