LEC-W_C

() (()) 19 - 5.2 File Step Data Save Load Parameter Save Load Alarm Save Capture Window Print Window View Status Teaching Alarm Step Data Parameter Drive Test Status Bar 20 - Action Step Data Download Upload Go Stop Step Go Hold Teaching Jog Direct Parameter Download Upload I/O Enable () System Setting Reset Window Cascade Windows Tile Horizontally Help Version

Thermo-chiller

Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution4 Set temperature range1 [C] 5 to 40 Cooling capacity3 (50/60 Hz) [W] 1700/1900 2500/2900 Heating capacity3 (50/60 Hz) [W] 430/540 430/540 Temperature stability5 [C] 0.1 Circulating fluid system Rated flow6, 7 (50/60 Hz) [L/min] 7 (0.13 MPa)/7 (0.18 MPa) Maximum flow rate (50/60 Hz) [L/min] 27/29 Maximum pump head (50/60 Hz) [m] 14/19

PA3145/3165/3185

Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size

SYJ300/500/700

14 6 L2 L1 21.5 22.5 9.5 21.5 Approx. 300 (Lead wire length) 49 (DIN 50.3) P P 42.9 71.2 [73.4] R R 2-5.5 (For mounting) (4.9) 1/4 (P, R port) (Pitch) P=19 21 Manual override For 1/8 (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + + + + 67 [74] + + + + 51.6 67 [74] A A 9.5 35 51.6 35 A A 8.5 (Pitch) P=19 21 One-touch fitting (A port) Applicable

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VQZ115l-lMl VQ110l-lLl 2.10-19

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. m Mey a 30 20 10 0 Transfer load m (kg) Refer to page 94 for deflection data. 60 Standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6PF thread depth 8 4 x M5 x 0.8 50 (2 x n1) x 5.5, Drill through 11.5, counter bore depth 5 30 Sensor cable Sensor cable fixing clip Stroke + 66 (Table movement range) (20.5) 82.5 40 40 19 A 42.5 32.5 A 19 Stroke + 95 22.5 64

Digital Flow Switch (Remote type monitor unit)

Selection of output mode (OUT2) Select the switch output mode required referring to the list of outputs (page 19). Press the button to select. [o20]: Instantaneous output mode [o21]: Accumulated output mode [o22]: Accumulated pulse output mode Press the button. Selection of switch operation (OUT1) Select the switch operation required referring to the list of outputs (page 19).

Table of Contents

C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A 42.5 22.5 32.5 19 A 19 Stroke + 95 64 Stroke + 169 89.5 40 10 5 30 Work piece mounting reference plane Dog fitting for switch 33 15 30 2 17.5 21.5 60 Body mounting reference plane Pitch = 100 Section AA (n1-1) x pitch 47.5 The body mounting reference

CG5-S

3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18

Valve Single Unit

Individual SUP spacer mounting size 23.5 P = 19 (Press and turn for the locking type.) (Lead wire length) (SUP port is mounted on the end plate side of single solenoid.)

CP95

Made to Order Specifications (For details, refer to page 6-17-19.)

Ejector Valve Unit Series ZYY/ZYX

Brown DC (+) Main circuit of switch OUT Black + 12 to 24 VDC Load 30V, 80mA Blue DC () ZSE1--14/-15/-18/-19 ZA Hysteresis can be set using the hysteresis setting trimmer. The setting is increased by turning it clockwise, and the range is 1 to 10% of the ON pressure. When the hysteresis setting trimmer is moved after setting the ON pressure, it must be set again.

Wedge Cam Operation Provides

41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

MRQ

Consult SMC for further information. 1.5-19

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

socket head cap bolt) (Hexagon bolt) (Hexagon nut) 7 2M5 x 0.8 thread depth 4.5 IN (Piping port) 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 (Through-hole) 4M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side.: Same) 2M5 x 0.8 thread depth 4.5 Note) 4M3 x 0.5 thread depth 4.5 (Opposite side: Same) (15+1/2ST) 19 (Opposite side: Same) 6 3 9.5 27.5 11 (19) (15+1/2ST) 4 Note) 11-, 22: Vacuum suction

VCW

Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions