Rotary Table

66 to 68 21 2 30 to 33 62 to 64 42 4 30 180 39 to 41 70 to 73 24 2 35 to 37 66 to 69 44 4 50 180 46 to 48 88 to 91 19 2 42 to 44 84 to 87 31 3 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

C76

Note Bore (mm) Every set includes: 1 rod seal 1 seal retaining washer 1 retaining ring C76-32PS 32 C76-40PS 40 6-10-37 38 Series C76R Specifications Bore size (mm) 40 32 14 12 Piston rod dia.

Stopper Cylinder

Gasket Carbon steel Pin B NBR 19 36 Piston seal Carbon steel Spacer NBR 20 37 Rolled steel Round head Phillips screw 38 Rolled steel Pin A 39 Replacement Parts/Seal Kit Steel wire Bracket spring 40 Contents Kit no.

1

SY30M-11-1A SY50M-11-1A SY70M-11-1A Cable length: 300 mm Cable weight: Approx.18 g ZS-37-L w Cable length: 500 mm Cable weight: Approx.23 g ZS-37-M M12 waterproof connector cable e Cable length: 1000 mm Cable weight: Approx.36 g ZS-37-N Cable length: 2000 mm Cable weight: Approx.62 g ZS-37-P e Cable length: 5000 mm Cable weight: Approx.140 g ZS-37-C Tightening torque Caution M2: 0.16 Nm (

RB/RBL/RBQ

RBQ16J RB20J (1) RBQ25J RBQ30J RBQ32J RBQ16S RB20S (2) RBQ25S RBQ30S RBQ32S RBQC16C RBQC20C RBQC25C RBQC30C RBQC32C 25.4 31.2 37 47.3 47.3 12 16 18 20 25 4.7 8.3 9.3 12.4 14.4 MVGQ CC Note 1) In the case of RB20J, RB and RBQ are common. Note 2) In the case of RB20S, RB and RBQ are common.

AC Servo Motor Driver (MECHATROLINK-III type)

Troubleshooting . 37 7.1 Alarms List . 37 7.2 WarningAlarms List . 40 2 - LECYU Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Clamp Cylinder with Lock Series CLK1

Chromated Aluminum alloy Carbon steel Flat washer Bushing Lead-bronze casting Rolled steel Cotter pin Bushing Lead-bronze casting Low carbon steel wire rod FR One-touch fitting Clevis bushing Oil-impregnated sintered alloy KRL08-02S Spatter cover Pivot Carbon steel Heat treated, Zinc chromated KR-08C FR double layer tube Lock ring Heat treated Carbon steel TRB0806W 30 31 32 33 34 35 36 37

Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA5-37 KT-PA5-38 KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve

RB/RBL/RBQ

RBQ16J RB20J (1) RBQ25J RBQ30J RBQ32J RBQ16S RB20S (2) RBQ25S RBQ30S RBQ32S RBQC16C RBQC20C RBQC25C RBQC30C RBQC32C 25.4 31.2 37 47.3 47.3 12 16 18 20 25 4.7 8.3 9.3 12.4 14.4 MVGQ CC Note 1) In the case of RB20J, RB and RBQ are common. Note 2) In the case of RB20S, RB and RBQ are common.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

-16CStroke MY1B32-16BStroke MYB32-16GA5901 MY1H40 MY40-16CStroke MY1B40-16BStroke MYB40-16GA5902 No. 15 16 25 Seal belt Dust seal band Cushion boss gasket 1 1 2 MY25-16CStroke MY1B25-16BStroke MYB25-16GA5900 Stainless steel NBR KA00311 (5.1 x 3 x 1.05) KA00320 (7.15 x 3.75 x 1.7) KA00320 (7.15 x 3.75 x 1.7) O-ring 36 NBR 2 Side scraper Scraper Piston seal Cushion seal Tube gasket O-ring 37

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Do not use a shock absorber together with air cushion. 2000 1500 Collision speed (mm/s) L unit Air Cushion Stroke 1000 Air cushion Bore size (mm) Cushion stroke 500 400 300 16 12 20 15 25 15 200 32 19 1002 3 5 10 20 50 40 24 30 100 4 50 30 Load weight (kg) 63 37 8-12-10 11 Model Selection Series MY1W Cushion Capacity Tightening Torque for Stroke Adjusting Unit Holding Bolts (Nm) Precautions

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 10 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

Space Saving Vacuum Ejector Vacuum Pump System

Pressure Sensor Assembly 37 Troubleshooting 39 1 - Doc. no.

3 Port Air Operated Valve Series SYJA300 1

Series SYJA500 Body ported: SYJA52-M5(-F) Base mounted: SYJA54-01 18 2-2.6 15.5 (For manifold mounting) 24 8.5 2.5 A 15 11 1 13 8.5 M5 x 0.8 34 (External pilot port) (Pilot port) (Bracket) (For solenoid valve) 2-4.5 Manual override (Non-locking) (Pilot port) (For mounting) M5 x 0.8 34 2-3.5 Manual override (Mounting hole pitch) (For mounting) (Non-locking) 8 10.6 9 A 1 32 24 15 X 24.5 18.6 (37

Table of Contents

External pilot port Rc 1/8 6.8 to 10 G 1/2 4-Rc 1/8 (PE port) 4-Rc 1/8 (PE port) 208.5 196.5 External pilot port PE X PE PE PE Rc 1/8 X EB EA P EB EA P 81 67 50 31 81 67 50 31 6-Rc 3/4 (P , EA, EB port) 37 37 43 72 61 37 37 6-Rc 3/4 (P , EA, EB port) 72 61 43 Formula for manifold weight M = 0.811n + 1.231 (kg) n: Stations n: Station Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194

Integrated Controller

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.

Compact Manifold Regulator

Dimensions 28 58 (Max. 60) 37 IN OUT 20 15 5 22 34 14 31 SMC IN OUT 62 4 x 1.5 W O-ring size Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 746 ARM10/11 Series Blocks/Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series.

CHKD/CHKG

Bore size (mm) 30 d 20 NTH-020 13 15 M8 x 1 12.5 5 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 D C 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 H B 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Note) There may be a slight difference between the

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size