SMC Corporation of America
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+ BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD terminal.

BS+ 0V 24V FG BSBDH 108.5 (Single) 113.1 (Double) 122 (3 position) ERR. PWR. BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.

ZS AS BS . This function raises an alarm when temperature of the circulating fluid is out of allowable upper and lower range. When the alarm is raised, WRN is indicated on LCD. If circulating fluid temperature returns to within allowable upper/ lower range, this alarm is automatically cancelled. The allowable upper and lower range of temperature can be set between 0.1 and 10 C.

With 1 shock absorber (Set on the driving cylinder side when packed.) 25 B 32 BS 40 Standard stroke Long stroke * Refer to p.3.8-10 for minimum strokes for auto switch equipped style. Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

V0V CANL FG CANH V+ 24V V0V CANL FG CANH V+ BDH BS+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA End resistance End resistance Master Connector with end resistance VSLD FG FG FG BDH CANL BDL FG CANH Type 3 grounding Type 3 grounding Type 3 grounding V+ Branching crimp connectors Twisted pair line with shielding DeviceNet CompoBus/S System

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

With Residual Pressure Release Valve Pilot, Silencer/Piping type Symbol Pilot type Built-in silencer Piping direction Internal External Nil V Side S V V R V V V Top RV V VP V V*1 B V Bottom BS V V BR V Vacuum Release Valve with Restrictor BSUP/EXH end block assembly (Includes a) A-e aTension bolt ( ) Tightening torque: 0.8 Nm SY3000: 2 pcs.

JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear. ALM Alarm reset mode Key Functions Moves upward for item selections. Also used to increase values for data entry. In combination with L/R keys, this key drives the actuator at high speed during a JOG operation.

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

BS Bumper bolt (resin tipped): Plate B side or C side Shock absorber Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

Then, piston A moves right , and the magnet goes into switch Bs operation range to turn on switch B. 7Cushions a) Rotary actuator is not adjusted so that the cushions work during shipment. Adjust the cushion valve attached to the cover depending on rotation time and load inertia moment.See Fig 15 b)Rotating the cushion valve reduces the orifice diameter and increases cushion effect.

Then, piston A moves right, and the magnet goes into switch Bs operation range to turn on switch B. Mounting of auto switch When tightening the auto switch mounting screw, use a precision screwdriver with a handle of 5 to 6 mm in diameter. Table 8 shows the recommended tightening torque. Use the designated slotted set screw (M2.54L) to mount the auto switch. Table 8.

Applicable air preparation equipment VHS4O vHs40-06 Nole) Although connection to to the mounting position; Pressure o a a a a a a a a r a a a a a a a a o a a a a a a a a a a a a a a a a a a o a a a a o a a a a o a a a a a a a a a o a a a a a VHS -TPressure relief I 3-port valve Notel) Only lor lhe NPTlhread Size combination Port thread Large knob utilizes an oversized knob for simDle oDeration

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Nil S n 90 91 Material restriction With lub-retainer Port thread type Auto switch Nil Without auto switch (Built-in magnet) 16 M thread Rc NPT G Nii *For the applicable auto switch models, refer to the table below. 20, 25 TN TF Adjuster option Symmetric type Nil AS AT A BS Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end