Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

10% of rated voltageClass BInrushHolding60 dB

10% of rated voltageClass BInrushHolding60 dB

Series: 2 (VQZ2000), Composite Symbol: 1 (2 Position Single), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: YO (DIN Terminal w/o Connector, w/oLight, w/oSurge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

VFM300

2 Description Material q Description No. Stainless steel Urethane rubber Notes No. Zinc alloy Aluminum alloy Material Notes Plunger Cushion for end cover Pilot body Body Metallic plated Metallic plated Black zinc chromate !3 !4 w e Zinc alloy Stainless steel Valve seat (A) !5 Brass Valve seat (B) Brass Head cover r Spool/sleeve t Polyacetal End cover !

IS1000

0 IS1000 No. q w e r t y u i o !

VFM300

Description Material POM Urethane rubber Note ZDC ADC Material Note No. q w e r t y u i o !0 !1 Description Plunger Cushion for end cover Pilot body Body Metallic plated Metallic plated Black zinc chromated !2 !3 !4 !5 !6 !7 !8 !

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

AFJ20 to AFJ40

Vacuum Filter AFJ20 to AFJ40 Symbol Vacuum lter SP AFJ40 AFJ30 AFJ20 How to Order ZCUK AMJ AFJ 30 q 03 e 80 B T Option/Nominal ltration rating/Type/Semi-standard: Select one of each for a to f. Semi-standard: When more than one specification is required, indicate in alphanumeric order.

IZSE_X101

1 Output 3-Screen Display High-Precision Digital Pressure Switch RoHS IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Valve Replacement Parts: Pilot Valve

Replacement pilot valve for the JSY3000/5000 b-side pilot valve 2 Pilot valve mounting screw (M2 x 16.5) Tightening torque: 0.15 Nm B tight flat head screw (M1.7) Tightening torque: 0.12 Nm 2 Pilot valve mounting screw (M2 x 25) Tightening torque: 0.15 Nm Loosen B tight at head screw to remove the pilot cover in the direction indicated by the arrow q.

IR1000-A/2000-A/3000-A

Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

VQ4000

VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting specications VQ 1/2 Type of actuation Nil Q

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Series: 2 (VQZ2000), Stations: 12 Stations, Option: D0 (DIN Rail Mount w/o DIN Rail), Thread: Rc, Q: Q (CE Marked)

Series: 1 (VQZ1000), Stations: 6 Stations, Option: D (DIN Rail Mounting), Thread: 00T, Q: Q (CE Marked)