3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Cylinder with Lock

D-Y7W D-Y7WV D-Y7BAL D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-A9 D-A9V D-B5 D-B64 D-P3DW D-P4DWL D-A59W D-F5NTL Bore size (mm) A B A B A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 10 8 4 1 6 3 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 6 4 10 8 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5

Standard Combinations

Metal bowl B B B B B Dimensions B B N.O.: Black B N.C.: Gray 1/8 10 One-touch fitting 1/4 Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D N P E G H1 H2 J K L L M (1) (1) (1) (1) (1) (1) ACG20B ACG30B ACG40B 1/8, 1/4 83 87 29 60 2.5 28.5 41.5 30 3.2 1/4, 3/8 110 115 41 80 2.5 29.5 55 41

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Plug-in/Plug Lead: Single Unit

2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P)

24

D-M9AV *1 D-A9 D-A9V D-Y69 D-Y7PV D-Y7WV *1 D-P3DWA *2 D-P4DW *2 D-P3DWA *3 D-P4DW *2 D-A9V Bore size Bore size A B A B A B A B A B 50 12.5 16.5 8.5 12.5 7.5 11.5 8 12 7 11 80 18 23.5 14 19.5 13 18.5 13.5 19 12.5 18 Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 50 32.5 38.5 36 34 44.5 50 80 40 45 74 43 71.5 41 70 49.5 78.5 61 84.5 *1: The auto switch mounting bracket BMG2-012 is used. *2: The auto

Rotary Actuator/Vane Style Series CRB2

Single flat (Key) A port B port

NCA1

A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71 7.44 2.36 1.30 9.44 5.56 200 (2") 5/8 7/16-20 3/4 2.60 1 1/8 3/

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Adapter B Ejector indication Nozzle dia./1.8, 2.0 mm ZR1-W 1 18 20 2 1 1 1 1 1 (Mounting hole) Silencer Adapter E Spacer B (Mounting hole) Rc 1/8 V port (Vacuum port) 1 M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

High Purity Fluoropolymer

3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

15

Description 2 Ring 1 1 1 2 Ring 1 3 Hub (Motor side) 1 1 1 1 1 1 3 Hub (Motor side) 1 1 4 Hexagon socket thin head cap screw 1 1 1 1 1 1 4 Hexagon socket thin head cap screw 1 1 5 Hexagon socket head cap screw 4 4 4 5 Hexagon socket head cap screw 4 840 LEJS Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) LEF LEJ LEL LEM LEY LES A LEPY LEPS [mm] LER

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

VZ5000

4(A), 2(B) port Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-40 VV5Z5-41 VV5Z5-42-C6 VV5Z5-42-C8 1/8 1/8 C6 C8 0.59 0.55 0.52 0.53 0.23 0.30 0.23 0.26 2.5 2.2 2.2 2.2 0.51 0.50 0.38 0.46 0.28 0.30 0.32 0.24 2.1 2.0 1.5 1.9 1/4 1/4 1/4 1/4 VZ54 Note) Value at

New

Test sampleVXFA21A (Port size 3/4) VXFA22A (Port size 1) VXFA23A (Port size 1 1/2)VXFA24A (Port size 2) VXFA25A, B (Port size 2 1/2) VXFA26A, B, C, D (Port size 3) VXFA27B (Port size 3 1/2) VXFA28B (Port size 4) Test sampleVXF21A (Port size 3/4) VXF22A (Port size 1) VXF23A (Port size 1 1/2)VXF24A (Port size 2) VXF25A, B (Port size 2 1/2)VXF26A, B, C, D (Port size 3) VXF27B (Port size 3 1/

Fieldbus system PROFINET compatible SI Unit

0: No error, 1: Short circuit 5 Valve 26, 27 diagnostics 0: No error, 1: Short circuit 6 Valve 28, 29 diagnostics 0: No error, 1: Short circuit 7 Valve 30, 31 diagnostics 0: No error, 1: Short circuit 31 No.EX-OMW0011-B 5.1.2.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

FILTER REGULATOR

1/8 M42X1.5 M42X1.5 38.4 38.4 AW40-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 AW40-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 1/8 44.3 AW60-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3