Compact Manifold Regulator

300 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate L/min (ANR

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

0.94 340 1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130 2.3 810 2.3 810 3/8 124 0.2 4.6 1,670 4.6 1,670 1/4 221 0.35 4.6 1,670 4.6 1,670 3/8 214 4.6 1,670 4.6 1,670 1/2 205 7.9 2,840 7.9 2,840 1/4 242 11.9 4,270 11.9 4,270 3/8 233 11.9 4,270 11.9 4,270 1/2 224 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Possible to transfer a workpiece at low-speed.

350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Manifold Specifications

350 L1 L2 Insert plug with lead wire: VV5ZS2-51GStation 1Port size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250

Large blow and

V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) Please consult with SMC if other specifications for surface treatment are required. 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Laser marking Hexagon wrench 8-18-2 8-18-3 3 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and

High Purity Fluoropolymer

Applicable fluid Note 1) Max. operating pressure (at 20C) 1.0MPa 0.9MPa 0.7MPa 0.7MPa 0.5MPa 0.6MPa 1.0MPa Burst pressure (at 20C) 6.9MPa 3.6MPa 2.9MPa 2.8MPa 4.7MPa 6.7MPa 4.6MPa 2.0MPa 2.6MPa 7.9MPa 4.9MPa 6.7MPa 6.4MPa Note 2) 20 20 Min. bending radius (mm) 65 110 160 40 30 60 290 160 12 Max. operating temperature 260C (Fixed use) Material Super PFA Note 1) The maximum operating pressure

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Compact Cylinder with Lock Series CLQ

L x 110 L 110 120 135 160 Individual -X -50D -50D -50D -50D x 125 L x 140 L x 165 L x 115 L 115 125 140 165 -75D -75D -75D x 150 L x 165 L x 190 L 150 165 190 -100D -100D -100D x 175 L x 190 L x 215 L 175 190 215 819 Series CLQ Construction: 20 to 32 i o !

2-Layer Soft Fluoropolymer Tubing

TQ0425 TQ0604 TQ0806 TQ1008 TQ1209 Temperature F (nC) 290 (2.0) 276 (1.9) 218 (1.5) 160 (1.1) 174 (1.2) 4 to 68 (20 to 20) 247 (1.7) 232 (1.6) 174 (1.2) 131 (0.9) 145 (1.0) 86 (30) Outer layer Inner layer Inner layer Outer layer 203 (1.4) 203 (1.4) 145 (1.0) 116 (0.8) 131 (0.9) 104 (40) Special Special Special Special Chemical Chemical 174 (1.2) 160 (1.1) 116 (0.8) 87 (0.6) 116 (0.8) 122

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

EX500

NS Power source connector Note 1) 88 68 68 88 12 12 COM D COM C COM B COM A 24VDC COM D COM C COM B COM A 24VDC Branch connector Note 2) Branch connector Note 2) Marker: BN-WH (Made by Phoenix Contact) Marker: BN-WH (Made by Phoenix Contact) 160 136 160 136 93.5 or less 48.8 48.8 46 46 10 10 Note 1) Power supply connector specification (M12, 5 pins, plug) Note 2) Branch connector specification

One-touch Fittings

P.161 P.162 KQ2T Branch Y Male branch tee KQ2U Male connector P.160 KQ2H Use to pipe a female thread in the same direction. Most general model. Use to branch a female thread in the same direction. Use to branch a female thread at both 90 angles. Male elbow P.160 KQ2L P.161 Male run tee KQ2Y Use to branch a female thread in the same direction and at a 90 angle.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 40 100 160 200 10 16 20 25 32 30 60 80 40 80 100 20 40 60 50 100 120 70 120 160 Nil 1 2 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

MHL2

Thread type Opening/Closing stroke (mm) Cylinder bore Symbol Type 10 20 40 60 16 30 60 80 20 40 80 100 25 50 100 120 32 70 120 160 40 100 160 200 Symbol Nil 10 to 25 M thread Rc NPT G Nil 1 2 TN TF 32 to 40 Double acting Action D Applicable Auto Switch/Refer to pages 761 to 809 for further information on the auto switches.

2-Layer Soft Fluoropolymer Tubing Series TQ

resin 5 5 5 > 5 > > > > 5 5 5 > > 203 (1.4) 203 (1.4) 145 (1.0) 116 (0.8) 131 (0.9) 104 (40) Chemical Chemical 87 (0.6) 174 (1.2) 160 (1.1) 116 (0.8) 116 (0.8) 122 (50) 73 (0.5) 160 (1.1) 145 (1.0) 102 (0.7) 102 (0.7) 144 (60) Hydrochloric acid Sulfuric acid Nitric acid Caustic soda Caustic potash Ammonlum hydroxide Hydrogen peroxide Water Phenol Benzene Toluene Xylene Carbon tetrachlorlde