SRP

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l

SRP

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz Valve size 1 7 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1

Magnetically Coupled

NCY3B10 0.10 NCY3B6 0.05 0.00 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 Stroke (inch) The above deflection data represent values at the time when the external sliding part moves to the middle of the stroke. Vertical Operation The load should be guided by a ball type bearing (linear guide, etc.).

Lubricator

Bowl assembly for AL40, 50, 60-D Semi-standard symbol 6 3 36 Semi-standard: (Standard) Semi-standard: 3 Piping port thread ty pe Piping port thread ty pe (7) Part No. (7) Part No. Rc Rc C4SL-D C4SL-3-D G G NPT C4SL-3(Z)-D NPT C4SL(-Z)-D Appearance and part No. Semi-standard: 36 Semi-standard: 6 Piping port thread ty pe Piping port thread ty pe (7) Part No. (7) Part No.

Title not found

Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100-240 VAC + 10% 15%, 20 8 inputs from I01 to I08 50-60 Hz Measurement range 0-255 Input impedance >or = 800 kOhms Resolution

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VCA

All types are equipped with surge voltage suppressor. 17-2-10 5 Series VCA Direct Operated 2 Port Solenoid Valve For Air Standard Specifications Valve construction Direct operated poppet Fluid Air, Inert gas, Low vacuum (133 Paabs) Withstand pressure (MPa) 2.0 Body material Al Seal material HNBR Valve specifications Ambient temperature (C) 20 to 60 Fluid temperature (C) 10 to 60 (No freezing

VCS

power (VA) 50/60 Hz VXA Holding VCS2: 10/8, VCS3: 15/13, VCS4: 19/16 Note 1) For low pressure steam at a temperature of 120C or less, use FKM for the seal material.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55> (Lead wire length) 80 (Rubber seal) <81> 60

PF2D

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

-X Operating temperature range (C) 5 to 60 The shock absorber service life is different from that of the MY1H cylinder depending on operating conditions.

Precision Clean Regulator

80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

DIN connector DIN connector with light A surge voltage suppressor is integrated inside the coil as a standard feature. 2 Made to Order 2(OUT) 1(IN) Made to order specifications (For details, refer to page 235) 22.0 MPa 2 Port Air Operated Valve Specifications Response Time 60 VCH42 (N.O.) VCH41 (N.C.)

        Series VKF300

4 3 Port Solenoid Valve Direct Operated Poppet Type Series VKF300 How to Order Valves Electrical entry G: Grommet (Lead wire length: 300 mm) Rated voltage D: DIN terminal DO: DIN terminal H: Grommet (Lead wire length: 600 mm) 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 240 VAC, Hz Other (Without connector) 50 60 50 60 4 50 60 5 6 7 50 60 9 Option Thread

Slide Unit Series CX2/CXWM/CXWL

0.8 thread depth 10 2 x 2 x M5 x 0.8 (Hexagon socket head cap plug) 2 x M5 x 0.8 Cylinder port 2 x 2 x M5 x 0.8 Thread depth 10 4 x 4.3 through 4 x 8 counterbore depth 4.5 2 x RB0805-X552 Shock absorber 2 x 2 x 5H7 depth 6 +0.012 0 CX2 CXW (mm) CXT L P Q S SS Z ZZ F Model CXWM16-50 CXWM16-75 CXWM16-100 CXWM16-125 CXWM16-150 CXWM16-175 CXWM16-200 35 63 30 164 52 100 152 188 CXSJ 32.5 88 60

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

Thermo-chiller Series HRZ Fluorinated Fluid Type

Hz) (l/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications 5/5 6/6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Soft start up valve with lock out

(50 Hz), 5.0VA (60 Hz) Inrush Energized Current consumption AC AC50 AC40 AC25 AC30 AC20 3.4VA (2.1W) 50 Hz, 2.3VA (1.5W) 60 Hz VHS20 VHS30 VHS40 VHS50 Current consumption DC 1.8W Electric entry Type D DIN Terminal, M12 connector Optional specification Indicator light/Surge voltage suppressor