3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IRV Direct operated precision regulator now available as a series!! (ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR-A 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IR Direct operated precision regulator now available as a series!! (ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

CG1x-OM0006N

GR-R-010(10g) 1 2 3) , 4 7 1 100 4 3g 1cm 1 2 100mm 7. 4. g 20 25 32 40 (mm) 100st 2 3 3 34 50st 0.5 0.5 0.5 1 19 3-2-4. 1) 8 8 2(9) 9 3) , 6 1mm 8. 9. 20 3-3. 3-3-1.

JXCx-OMT0028CN

)(LEC-W2)(CN2SW)OFF (LEC-T1-3G)(LEC-W2) TB/PC (CN2) LED CN2 SW CN2STAT BUS STAT OFF (1) GW CN2 3m LEC-T1-3G (2) LEC-W2 USB CD GW 120.3 120.3 mm mm 200 200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Note 2) Check valve assembly contains check valve, check valve cover and its screws (2 pcs). 27 Series ARG20K/30K/40K Construction F E Port size D A C IN OUT SMC G R B Q Set nut (Option) S P T N M Bracket (Option) Panel fitting dimension K J IN OUT L H P K U C S O H L to Plate thickness ARG20K to 40K: Max. 3.5 Standard specifications Accessory specifications Panel mount Bracket mount A Model

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Series M Miniature Fittings M3, R(PT) 1/8, M5

P. 93 M-3G Hose nipple M-5H-4 Manifold Rc(PT) can be diverted in up to 8, M5 stations this includes panel mount or bracket mount capabilities. 1 8 4/2.5 For nylon, soft nylon, and polyurethane tube. 1 8 Rc(PT) -M5 female (9 stations) P. 90 M-5M M-5H-6 P. 91 6/4 P. 93 Series/Model Type Application Note Reducer bushing Hose elbow M-5HL-4 Barb fitting M-01AN-4 For reducing Rc(PT) female to M5

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Modular F.R.L. Unit

Symbol Nil B Note 1) C D E G Note 2) P Applicable models AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K F Note 2) G Note 1) Drain guide: For NPT 1/4 (applicable to AW30K and 40K), the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30K and 40K).

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Modular F.R.L. Unit

to 40K 8 Metal bowl with level gauge AW30K, 40K With back flow mechanism C With bowl guard AW20K J Note 5) Drain guide 1/4 AW30K, 40K Note) AW10 comes with a back flow mechanism as a standard feature.

REGULATOR

/50K-B/60K-B Bracket assembly Panel mounting disassembly drawing Bracket assembly Mounting screws (2 pcs) Bracket Products Bracket assembly AR20K-B / 25K-B / 30K-B / 40K-B Bracket assembly Bracket assembly B / 60K-B AR50K-B / 60K (Roulette faces) (Roulette faces) Bracket assembly (Concave) Set nut (Convex) Products Bracket 14 9.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

l

Material Note No. 125 140 160 Description Mat'l CG1 CG1 Wiper ring Cushion seal Black coated Black coated Hard anodized Hard chrome plated Chromated Hard chrome plated Black coated Rod cover Head cover Rolled steel plate Rolled steel plate Aluminum alloy SFR-36K DSM-50S PNY-36 NLP-125A P7 C120 SFR-36K DSM-50S PNY-36 NLP-140A P7 C135 G25 G55 N-12.5-1.5 SFR-40K DSM-50S PNY-40 NLP-160A P7 C155